7/3/2010	12:25:35 AM	H2 valve closed
7/3/2010	12:25:35 AM	BCl3 valve closed
7/3/2010	12:25:35 AM	PH3 valve closed
7/3/2010	12:25:35 AM	SiCl4 pre valve closed
7/3/2010	12:25:35 AM	SiCl4 post valve closed
7/3/2010	12:25:35 AM	Main Vac valve closed
7/3/2010	12:25:35 AM	Bypass valve closed
7/3/2010	12:25:35 AM	Helium valve opened
7/3/2010	12:25:35 AM	Bubbler valve opened
7/3/2010	12:25:35 AM	Helium MFC set to  500.000000
7/3/2010	12:25:35 AM	H2 MFC set to  0.000000
7/3/2010	12:25:35 AM	BCl3 MFC set to  0.000000
7/3/2010	12:25:35 AM	PHl3 MFC set to  0.000000
7/3/2010	12:25:35 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:25:35 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:25:35 AM	Tube furnace set to 0
7/3/2010	12:45:35 AM	Helium valve closed
7/3/2010	12:45:35 AM	H2 valve closed
7/3/2010	12:45:35 AM	BCl3 valve closed
7/3/2010	12:45:35 AM	PH3 valve closed
7/3/2010	12:45:35 AM	SiCl4 pre valve closed
7/3/2010	12:45:35 AM	SiCl4 post valve closed
7/3/2010	12:45:35 AM	Main Vac valve closed
7/3/2010	12:45:35 AM	Bypass valve closed
7/3/2010	12:45:35 AM	Bubbler valve closed
7/3/2010	12:45:35 AM	Helium MFC set to  0.000000
7/3/2010	12:45:35 AM	H2 MFC set to  0.000000
7/3/2010	12:45:35 AM	BCl3 MFC set to  0.000000
7/3/2010	12:45:35 AM	PHl3 MFC set to  0.000000
7/3/2010	12:45:35 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:45:35 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:45:35 AM	Tube furnace set to 0
7/3/2010	12:45:36 AM	Run finished at 12:45 AM
7/3/2010	12:49:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	12:49:10 AM	Recipe started at 12:49 AM
7/3/2010	12:49:10 AM	Helium valve closed
7/3/2010	12:49:10 AM	H2 valve closed
7/3/2010	12:49:10 AM	BCl3 valve closed
7/3/2010	12:49:10 AM	PH3 valve closed
7/3/2010	12:49:10 AM	SiCl4 pre valve closed
7/3/2010	12:49:10 AM	SiCl4 post valve closed
7/3/2010	12:49:10 AM	Main Vac valve closed
7/3/2010	12:49:10 AM	Bubbler valve closed
7/3/2010	12:49:10 AM	Bypass valve opened
7/3/2010	12:49:10 AM	Helium MFC set to  0.000000
7/3/2010	12:49:10 AM	H2 MFC set to  0.000000
7/3/2010	12:49:10 AM	BCl3 MFC set to  0.000000
7/3/2010	12:49:10 AM	PHl3 MFC set to  0.000000
7/3/2010	12:49:10 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:49:10 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:49:10 AM	Tube furnace set to 0
7/3/2010	12:49:57 AM	Helium valve closed
7/3/2010	12:49:57 AM	H2 valve closed
7/3/2010	12:49:57 AM	BCl3 valve closed
7/3/2010	12:49:57 AM	PH3 valve closed
7/3/2010	12:49:57 AM	SiCl4 pre valve closed
7/3/2010	12:49:57 AM	SiCl4 post valve closed
7/3/2010	12:49:57 AM	Bubbler valve closed
7/3/2010	12:49:57 AM	Main Vac valve opened
7/3/2010	12:49:57 AM	Bypass valve opened
7/3/2010	12:49:57 AM	Helium MFC set to  0.000000
7/3/2010	12:49:57 AM	H2 MFC set to  0.000000
7/3/2010	12:49:57 AM	BCl3 MFC set to  0.000000
7/3/2010	12:49:57 AM	PHl3 MFC set to  0.000000
7/3/2010	12:49:57 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:49:57 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:49:57 AM	Tube furnace set to 0
7/3/2010	12:49:58 AM	Run finished at 12:49 AM
7/3/2010	12:49:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	12:50:31 AM	Recipe started at 12:50 AM
7/3/2010	12:50:31 AM	H2 valve closed
7/3/2010	12:50:31 AM	BCl3 valve closed
7/3/2010	12:50:31 AM	PH3 valve closed
7/3/2010	12:50:31 AM	SiCl4 pre valve closed
7/3/2010	12:50:31 AM	SiCl4 post valve closed
7/3/2010	12:50:31 AM	Main Vac valve closed
7/3/2010	12:50:31 AM	Bypass valve closed
7/3/2010	12:50:31 AM	Bubbler valve closed
7/3/2010	12:50:31 AM	Helium valve opened
7/3/2010	12:50:31 AM	Helium MFC set to  500.000000
7/3/2010	12:50:31 AM	H2 MFC set to  0.000000
7/3/2010	12:50:31 AM	BCl3 MFC set to  0.000000
7/3/2010	12:50:31 AM	PHl3 MFC set to  0.000000
7/3/2010	12:50:31 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:50:31 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:50:31 AM	Tube furnace set to 80
7/3/2010	12:51:13 AM	Helium valve closed
7/3/2010	12:51:13 AM	H2 valve closed
7/3/2010	12:51:13 AM	BCl3 valve closed
7/3/2010	12:51:13 AM	PH3 valve closed
7/3/2010	12:51:13 AM	SiCl4 pre valve closed
7/3/2010	12:51:13 AM	SiCl4 post valve closed
7/3/2010	12:51:13 AM	Main Vac valve closed
7/3/2010	12:51:13 AM	Bypass valve closed
7/3/2010	12:51:13 AM	Bubbler valve closed
7/3/2010	12:51:13 AM	Helium MFC set to  0.000000
7/3/2010	12:51:13 AM	H2 MFC set to  0.000000
7/3/2010	12:51:13 AM	BCl3 MFC set to  0.000000
7/3/2010	12:51:13 AM	PHl3 MFC set to  0.000000
7/3/2010	12:51:13 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:51:13 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:51:13 AM	Tube furnace set to 80
7/3/2010	12:51:28 AM	Helium valve closed
7/3/2010	12:51:28 AM	H2 valve closed
7/3/2010	12:51:28 AM	BCl3 valve closed
7/3/2010	12:51:28 AM	PH3 valve closed
7/3/2010	12:51:28 AM	SiCl4 pre valve closed
7/3/2010	12:51:28 AM	SiCl4 post valve closed
7/3/2010	12:51:28 AM	Main Vac valve closed
7/3/2010	12:51:28 AM	Bubbler valve closed
7/3/2010	12:51:28 AM	Bypass valve opened
7/3/2010	12:51:28 AM	Helium MFC set to  0.000000
7/3/2010	12:51:28 AM	H2 MFC set to  0.000000
7/3/2010	12:51:28 AM	BCl3 MFC set to  0.000000
7/3/2010	12:51:28 AM	PHl3 MFC set to  0.000000
7/3/2010	12:51:28 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:51:28 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:51:29 AM	Tube furnace set to 80
7/3/2010	12:51:57 AM	Helium valve closed
7/3/2010	12:51:57 AM	H2 valve closed
7/3/2010	12:51:57 AM	BCl3 valve closed
7/3/2010	12:51:57 AM	PH3 valve closed
7/3/2010	12:51:57 AM	SiCl4 pre valve closed
7/3/2010	12:51:57 AM	SiCl4 post valve closed
7/3/2010	12:51:57 AM	Bubbler valve closed
7/3/2010	12:51:57 AM	Main Vac valve opened
7/3/2010	12:51:57 AM	Bypass valve opened
7/3/2010	12:51:57 AM	Helium MFC set to  0.000000
7/3/2010	12:51:57 AM	H2 MFC set to  0.000000
7/3/2010	12:51:57 AM	BCl3 MFC set to  0.000000
7/3/2010	12:51:57 AM	PHl3 MFC set to  0.000000
7/3/2010	12:51:57 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:51:57 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:51:57 AM	Tube furnace set to 80
7/3/2010	12:54:57 AM	H2 valve closed
7/3/2010	12:54:57 AM	BCl3 valve closed
7/3/2010	12:54:57 AM	PH3 valve closed
7/3/2010	12:54:57 AM	SiCl4 pre valve closed
7/3/2010	12:54:57 AM	SiCl4 post valve closed
7/3/2010	12:54:57 AM	Main Vac valve closed
7/3/2010	12:54:57 AM	Bypass valve closed
7/3/2010	12:54:57 AM	Bubbler valve closed
7/3/2010	12:54:57 AM	Helium valve opened
7/3/2010	12:54:57 AM	Helium MFC set to  500.000000
7/3/2010	12:54:57 AM	H2 MFC set to  0.000000
7/3/2010	12:54:57 AM	BCl3 MFC set to  0.000000
7/3/2010	12:54:57 AM	PHl3 MFC set to  0.000000
7/3/2010	12:54:57 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:54:57 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:54:57 AM	Tube furnace set to 80
7/3/2010	12:55:39 AM	Helium valve closed
7/3/2010	12:55:39 AM	H2 valve closed
7/3/2010	12:55:39 AM	BCl3 valve closed
7/3/2010	12:55:39 AM	PH3 valve closed
7/3/2010	12:55:39 AM	SiCl4 pre valve closed
7/3/2010	12:55:39 AM	SiCl4 post valve closed
7/3/2010	12:55:39 AM	Main Vac valve closed
7/3/2010	12:55:39 AM	Bypass valve closed
7/3/2010	12:55:39 AM	Bubbler valve closed
7/3/2010	12:55:39 AM	Helium MFC set to  0.000000
7/3/2010	12:55:39 AM	H2 MFC set to  0.000000
7/3/2010	12:55:39 AM	BCl3 MFC set to  0.000000
7/3/2010	12:55:39 AM	PHl3 MFC set to  0.000000
7/3/2010	12:55:39 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:55:39 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:55:40 AM	Tube furnace set to 80
7/3/2010	12:55:55 AM	Helium valve closed
7/3/2010	12:55:55 AM	H2 valve closed
7/3/2010	12:55:55 AM	BCl3 valve closed
7/3/2010	12:55:55 AM	PH3 valve closed
7/3/2010	12:55:55 AM	SiCl4 pre valve closed
7/3/2010	12:55:55 AM	SiCl4 post valve closed
7/3/2010	12:55:55 AM	Main Vac valve closed
7/3/2010	12:55:55 AM	Bubbler valve closed
7/3/2010	12:55:55 AM	Bypass valve opened
7/3/2010	12:55:55 AM	Helium MFC set to  0.000000
7/3/2010	12:55:55 AM	H2 MFC set to  0.000000
7/3/2010	12:55:55 AM	BCl3 MFC set to  0.000000
7/3/2010	12:55:55 AM	PHl3 MFC set to  0.000000
7/3/2010	12:55:55 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:55:55 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:55:55 AM	Tube furnace set to 80
7/3/2010	12:56:23 AM	Helium valve closed
7/3/2010	12:56:23 AM	H2 valve closed
7/3/2010	12:56:23 AM	BCl3 valve closed
7/3/2010	12:56:23 AM	PH3 valve closed
7/3/2010	12:56:23 AM	SiCl4 pre valve closed
7/3/2010	12:56:23 AM	SiCl4 post valve closed
7/3/2010	12:56:23 AM	Bubbler valve closed
7/3/2010	12:56:23 AM	Main Vac valve opened
7/3/2010	12:56:23 AM	Bypass valve opened
7/3/2010	12:56:23 AM	Helium MFC set to  0.000000
7/3/2010	12:56:23 AM	H2 MFC set to  0.000000
7/3/2010	12:56:23 AM	BCl3 MFC set to  0.000000
7/3/2010	12:56:23 AM	PHl3 MFC set to  0.000000
7/3/2010	12:56:23 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:56:23 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:56:23 AM	Tube furnace set to 80
7/3/2010	12:59:23 AM	H2 valve closed
7/3/2010	12:59:23 AM	BCl3 valve closed
7/3/2010	12:59:23 AM	PH3 valve closed
7/3/2010	12:59:23 AM	SiCl4 pre valve closed
7/3/2010	12:59:23 AM	SiCl4 post valve closed
7/3/2010	12:59:23 AM	Main Vac valve closed
7/3/2010	12:59:24 AM	Bypass valve closed
7/3/2010	12:59:24 AM	Bubbler valve closed
7/3/2010	12:59:24 AM	Helium valve opened
7/3/2010	12:59:24 AM	Helium MFC set to  500.000000
7/3/2010	12:59:24 AM	H2 MFC set to  0.000000
7/3/2010	12:59:24 AM	BCl3 MFC set to  0.000000
7/3/2010	12:59:24 AM	PHl3 MFC set to  0.000000
7/3/2010	12:59:24 AM	SiCl4 MFC set to  0.000000
7/3/2010	12:59:24 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	12:59:24 AM	Tube furnace set to 80
7/3/2010	1:00:05 AM	Helium valve closed
7/3/2010	1:00:05 AM	H2 valve closed
7/3/2010	1:00:05 AM	BCl3 valve closed
7/3/2010	1:00:05 AM	PH3 valve closed
7/3/2010	1:00:05 AM	SiCl4 pre valve closed
7/3/2010	1:00:05 AM	SiCl4 post valve closed
7/3/2010	1:00:05 AM	Main Vac valve closed
7/3/2010	1:00:05 AM	Bypass valve closed
7/3/2010	1:00:05 AM	Bubbler valve closed
7/3/2010	1:00:05 AM	Helium MFC set to  0.000000
7/3/2010	1:00:05 AM	H2 MFC set to  0.000000
7/3/2010	1:00:05 AM	BCl3 MFC set to  0.000000
7/3/2010	1:00:05 AM	PHl3 MFC set to  0.000000
7/3/2010	1:00:05 AM	SiCl4 MFC set to  0.000000
7/3/2010	1:00:05 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	1:00:05 AM	Tube furnace set to 80
7/3/2010	1:00:20 AM	Helium valve closed
7/3/2010	1:00:20 AM	H2 valve closed
7/3/2010	1:00:20 AM	BCl3 valve closed
7/3/2010	1:00:20 AM	PH3 valve closed
7/3/2010	1:00:20 AM	SiCl4 pre valve closed
7/3/2010	1:00:20 AM	SiCl4 post valve closed
7/3/2010	1:00:20 AM	Main Vac valve closed
7/3/2010	1:00:20 AM	Bubbler valve closed
7/3/2010	1:00:20 AM	Bypass valve opened
7/3/2010	1:00:20 AM	Helium MFC set to  0.000000
7/3/2010	1:00:20 AM	H2 MFC set to  0.000000
7/3/2010	1:00:20 AM	BCl3 MFC set to  0.000000
7/3/2010	1:00:20 AM	PHl3 MFC set to  0.000000
7/3/2010	1:00:20 AM	SiCl4 MFC set to  0.000000
7/3/2010	1:00:20 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	1:00:21 AM	Tube furnace set to 80
7/3/2010	1:00:49 AM	Helium valve closed
7/3/2010	1:00:49 AM	H2 valve closed
7/3/2010	1:00:49 AM	BCl3 valve closed
7/3/2010	1:00:49 AM	PH3 valve closed
7/3/2010	1:00:49 AM	SiCl4 pre valve closed
7/3/2010	1:00:49 AM	SiCl4 post valve closed
7/3/2010	1:00:49 AM	Bubbler valve closed
7/3/2010	1:00:49 AM	Main Vac valve opened
7/3/2010	1:00:49 AM	Bypass valve opened
7/3/2010	1:00:49 AM	Helium MFC set to  0.000000
7/3/2010	1:00:49 AM	H2 MFC set to  0.000000
7/3/2010	1:00:49 AM	BCl3 MFC set to  0.000000
7/3/2010	1:00:49 AM	PHl3 MFC set to  0.000000
7/3/2010	1:00:49 AM	SiCl4 MFC set to  0.000000
7/3/2010	1:00:49 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	1:00:49 AM	Tube furnace set to 80
7/3/2010	1:03:49 AM	Helium valve closed
7/3/2010	1:03:49 AM	H2 valve closed
7/3/2010	1:03:49 AM	BCl3 valve closed
7/3/2010	1:03:49 AM	PH3 valve closed
7/3/2010	1:03:49 AM	SiCl4 pre valve closed
7/3/2010	1:03:49 AM	SiCl4 post valve closed
7/3/2010	1:03:49 AM	Bubbler valve closed
7/3/2010	1:03:49 AM	Main Vac valve opened
7/3/2010	1:03:49 AM	Bypass valve opened
7/3/2010	1:03:49 AM	Helium MFC set to  0.000000
7/3/2010	1:03:49 AM	H2 MFC set to  0.000000
7/3/2010	1:03:49 AM	BCl3 MFC set to  0.000000
7/3/2010	1:03:49 AM	PHl3 MFC set to  0.000000
7/3/2010	1:03:49 AM	SiCl4 MFC set to  0.000000
7/3/2010	1:03:49 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	1:03:49 AM	Tube furnace set to 0
7/3/2010	1:03:50 AM	Run finished at 1:03 AM
7/3/2010	2:02:00 AM	Bypass valve closed
7/3/2010	2:02:01 AM	Main Vac valve closed
7/3/2010	2:02:17 AM	Bypass valve opened
7/3/2010	2:02:17 AM	Main Vac valve opened
7/3/2010	2:02:31 AM	Main Vac valve closed
7/3/2010	2:02:33 AM	Bypass valve closed
7/3/2010	2:02:35 AM	Bypass valve opened
7/3/2010	2:02:37 AM	Main Vac valve opened
7/3/2010	2:03:16 AM	Recipe started at 2:03 AM
7/3/2010	2:03:16 AM	Helium valve closed
7/3/2010	2:03:16 AM	BCl3 valve closed
7/3/2010	2:03:16 AM	PH3 valve closed
7/3/2010	2:03:16 AM	SiCl4 pre valve closed
7/3/2010	2:03:16 AM	SiCl4 post valve closed
7/3/2010	2:03:16 AM	Main Vac valve closed
7/3/2010	2:03:16 AM	Bypass valve closed
7/3/2010	2:03:16 AM	Bubbler valve closed
7/3/2010	2:03:16 AM	H2 valve opened
7/3/2010	2:03:16 AM	Helium MFC set to  0.000000
7/3/2010	2:03:16 AM	H2 MFC set to  500.000000
7/3/2010	2:03:16 AM	BCl3 MFC set to  0.000000
7/3/2010	2:03:16 AM	PHl3 MFC set to  0.000000
7/3/2010	2:03:16 AM	SiCl4 MFC set to  0.000000
7/3/2010	2:03:16 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:03:16 AM	Tube furnace set to 0
7/3/2010	2:04:35 AM	Helium valve closed
7/3/2010	2:04:35 AM	BCl3 valve closed
7/3/2010	2:04:35 AM	PH3 valve closed
7/3/2010	2:04:35 AM	SiCl4 pre valve closed
7/3/2010	2:04:35 AM	SiCl4 post valve closed
7/3/2010	2:04:35 AM	Main Vac valve closed
7/3/2010	2:04:35 AM	Bypass valve closed
7/3/2010	2:04:35 AM	H2 valve opened
7/3/2010	2:04:35 AM	Bubbler valve opened
7/3/2010	2:04:35 AM	Helium MFC set to  0.000000
7/3/2010	2:04:35 AM	H2 MFC set to  500.000000
7/3/2010	2:04:35 AM	BCl3 MFC set to  0.000000
7/3/2010	2:04:35 AM	PHl3 MFC set to  0.000000
7/3/2010	2:04:35 AM	SiCl4 MFC set to  0.000000
7/3/2010	2:04:35 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:04:36 AM	Tube furnace set to 1000
7/3/2010	2:24:35 AM	Helium valve closed
7/3/2010	2:24:35 AM	BCl3 valve closed
7/3/2010	2:24:36 AM	Main Vac valve closed
7/3/2010	2:24:36 AM	Bypass valve closed
7/3/2010	2:24:36 AM	H2 valve opened
7/3/2010	2:24:36 AM	PH3 valve opened
7/3/2010	2:24:36 AM	SiCl4 pre valve opened
7/3/2010	2:24:36 AM	SiCl4 post valve opened
7/3/2010	2:24:36 AM	Bubbler valve opened
7/3/2010	2:24:36 AM	Helium MFC set to  0.000000
7/3/2010	2:24:36 AM	H2 MFC set to  500.000000
7/3/2010	2:24:36 AM	BCl3 MFC set to  0.000000
7/3/2010	2:24:36 AM	PHl3 MFC set to  1.000000
7/3/2010	2:24:36 AM	SiCl4 MFC set to  50.000000
7/3/2010	2:24:36 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:24:36 AM	Tube furnace set to 1000
7/3/2010	2:52:36 AM	H2 valve closed
7/3/2010	2:52:36 AM	BCl3 valve closed
7/3/2010	2:52:36 AM	PH3 valve closed
7/3/2010	2:52:36 AM	SiCl4 pre valve closed
7/3/2010	2:52:36 AM	SiCl4 post valve closed
7/3/2010	2:52:36 AM	Main Vac valve closed
7/3/2010	2:52:36 AM	Bypass valve closed
7/3/2010	2:52:36 AM	Helium valve opened
7/3/2010	2:52:36 AM	Bubbler valve opened
7/3/2010	2:52:36 AM	Helium MFC set to  500.000000
7/3/2010	2:52:36 AM	H2 MFC set to  0.000000
7/3/2010	2:52:36 AM	BCl3 MFC set to  0.000000
7/3/2010	2:52:36 AM	PHl3 MFC set to  0.000000
7/3/2010	2:52:36 AM	SiCl4 MFC set to  0.000000
7/3/2010	2:52:36 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:52:36 AM	Tube furnace set to 0
7/3/2010	3:12:36 AM	Helium valve closed
7/3/2010	3:12:36 AM	H2 valve closed
7/3/2010	3:12:36 AM	BCl3 valve closed
7/3/2010	3:12:36 AM	PH3 valve closed
7/3/2010	3:12:36 AM	SiCl4 pre valve closed
7/3/2010	3:12:36 AM	SiCl4 post valve closed
7/3/2010	3:12:36 AM	Main Vac valve closed
7/3/2010	3:12:36 AM	Bypass valve closed
7/3/2010	3:12:36 AM	Bubbler valve closed
7/3/2010	3:12:36 AM	Helium MFC set to  0.000000
7/3/2010	3:12:36 AM	H2 MFC set to  0.000000
7/3/2010	3:12:36 AM	BCl3 MFC set to  0.000000
7/3/2010	3:12:36 AM	PHl3 MFC set to  0.000000
7/3/2010	3:12:36 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:12:36 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:12:36 AM	Tube furnace set to 0
7/3/2010	3:12:36 AM	Run finished at 3:12 AM
7/3/2010	3:15:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	3:15:40 AM	Recipe started at 3:15 AM
7/3/2010	3:15:40 AM	Helium valve closed
7/3/2010	3:15:40 AM	H2 valve closed
7/3/2010	3:15:40 AM	BCl3 valve closed
7/3/2010	3:15:40 AM	PH3 valve closed
7/3/2010	3:15:40 AM	SiCl4 pre valve closed
7/3/2010	3:15:40 AM	SiCl4 post valve closed
7/3/2010	3:15:40 AM	Main Vac valve closed
7/3/2010	3:15:40 AM	Bubbler valve closed
7/3/2010	3:15:40 AM	Bypass valve opened
7/3/2010	3:15:40 AM	Helium MFC set to  0.000000
7/3/2010	3:15:40 AM	H2 MFC set to  0.000000
7/3/2010	3:15:40 AM	BCl3 MFC set to  0.000000
7/3/2010	3:15:40 AM	PHl3 MFC set to  0.000000
7/3/2010	3:15:40 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:15:40 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:15:41 AM	Tube furnace set to 0
7/3/2010	3:16:28 AM	Helium valve closed
7/3/2010	3:16:28 AM	H2 valve closed
7/3/2010	3:16:28 AM	BCl3 valve closed
7/3/2010	3:16:28 AM	PH3 valve closed
7/3/2010	3:16:28 AM	SiCl4 pre valve closed
7/3/2010	3:16:28 AM	SiCl4 post valve closed
7/3/2010	3:16:28 AM	Bubbler valve closed
7/3/2010	3:16:28 AM	Main Vac valve opened
7/3/2010	3:16:28 AM	Bypass valve opened
7/3/2010	3:16:28 AM	Helium MFC set to  0.000000
7/3/2010	3:16:28 AM	H2 MFC set to  0.000000
7/3/2010	3:16:28 AM	BCl3 MFC set to  0.000000
7/3/2010	3:16:28 AM	PHl3 MFC set to  0.000000
7/3/2010	3:16:28 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:16:28 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:16:28 AM	Tube furnace set to 0
7/3/2010	3:16:28 AM	Run finished at 3:16 AM
7/3/2010	3:16:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	3:16:55 AM	Recipe started at 3:16 AM
7/3/2010	3:16:55 AM	H2 valve closed
7/3/2010	3:16:55 AM	BCl3 valve closed
7/3/2010	3:16:55 AM	PH3 valve closed
7/3/2010	3:16:55 AM	SiCl4 pre valve closed
7/3/2010	3:16:55 AM	SiCl4 post valve closed
7/3/2010	3:16:55 AM	Main Vac valve closed
7/3/2010	3:16:55 AM	Bypass valve closed
7/3/2010	3:16:55 AM	Bubbler valve closed
7/3/2010	3:16:55 AM	Helium valve opened
7/3/2010	3:16:55 AM	Helium MFC set to  500.000000
7/3/2010	3:16:55 AM	H2 MFC set to  0.000000
7/3/2010	3:16:55 AM	BCl3 MFC set to  0.000000
7/3/2010	3:16:55 AM	PHl3 MFC set to  0.000000
7/3/2010	3:16:55 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:16:55 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:16:55 AM	Tube furnace set to 80
7/3/2010	3:17:37 AM	Helium valve closed
7/3/2010	3:17:37 AM	H2 valve closed
7/3/2010	3:17:37 AM	BCl3 valve closed
7/3/2010	3:17:37 AM	PH3 valve closed
7/3/2010	3:17:37 AM	SiCl4 pre valve closed
7/3/2010	3:17:37 AM	SiCl4 post valve closed
7/3/2010	3:17:37 AM	Main Vac valve closed
7/3/2010	3:17:37 AM	Bypass valve closed
7/3/2010	3:17:37 AM	Bubbler valve closed
7/3/2010	3:17:37 AM	Helium MFC set to  0.000000
7/3/2010	3:17:37 AM	H2 MFC set to  0.000000
7/3/2010	3:17:37 AM	BCl3 MFC set to  0.000000
7/3/2010	3:17:37 AM	PHl3 MFC set to  0.000000
7/3/2010	3:17:37 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:17:37 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:17:37 AM	Tube furnace set to 80
7/3/2010	3:17:52 AM	Helium valve closed
7/3/2010	3:17:52 AM	H2 valve closed
7/3/2010	3:17:52 AM	BCl3 valve closed
7/3/2010	3:17:52 AM	PH3 valve closed
7/3/2010	3:17:52 AM	SiCl4 pre valve closed
7/3/2010	3:17:52 AM	SiCl4 post valve closed
7/3/2010	3:17:52 AM	Main Vac valve closed
7/3/2010	3:17:52 AM	Bubbler valve closed
7/3/2010	3:17:52 AM	Bypass valve opened
7/3/2010	3:17:52 AM	Helium MFC set to  0.000000
7/3/2010	3:17:52 AM	H2 MFC set to  0.000000
7/3/2010	3:17:52 AM	BCl3 MFC set to  0.000000
7/3/2010	3:17:52 AM	PHl3 MFC set to  0.000000
7/3/2010	3:17:52 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:17:52 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:17:52 AM	Tube furnace set to 80
7/3/2010	3:18:20 AM	Helium valve closed
7/3/2010	3:18:20 AM	H2 valve closed
7/3/2010	3:18:20 AM	BCl3 valve closed
7/3/2010	3:18:20 AM	PH3 valve closed
7/3/2010	3:18:20 AM	SiCl4 pre valve closed
7/3/2010	3:18:20 AM	SiCl4 post valve closed
7/3/2010	3:18:20 AM	Bubbler valve closed
7/3/2010	3:18:20 AM	Main Vac valve opened
7/3/2010	3:18:20 AM	Bypass valve opened
7/3/2010	3:18:20 AM	Helium MFC set to  0.000000
7/3/2010	3:18:20 AM	H2 MFC set to  0.000000
7/3/2010	3:18:20 AM	BCl3 MFC set to  0.000000
7/3/2010	3:18:20 AM	PHl3 MFC set to  0.000000
7/3/2010	3:18:20 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:18:20 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:18:20 AM	Tube furnace set to 80
7/3/2010	3:19:48 AM	Run aborted at 3:19 AM
7/3/2010	3:19:48 AM	Helium valve closed
7/3/2010	3:19:48 AM	H2 valve closed
7/3/2010	3:19:48 AM	BCl3 valve closed
7/3/2010	3:19:48 AM	PH3 valve closed
7/3/2010	3:19:48 AM	SiCl4 pre valve closed
7/3/2010	3:19:48 AM	SiCl4 post valve closed
7/3/2010	3:19:48 AM	Bypass valve closed
7/3/2010	3:19:48 AM	Main Vac valve closed
7/3/2010	3:19:48 AM	Bubbler valve closed
7/3/2010	3:19:48 AM	Helium MFC set to  0.000000
7/3/2010	3:19:48 AM	H2 MFC set to  0.000000
7/3/2010	3:19:48 AM	BCl3 MFC set to  0.000000
7/3/2010	3:19:48 AM	PHl3 MFC set to  0.000000
7/3/2010	3:19:48 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:19:49 AM	Tube furnace set to 0
7/3/2010	3:19:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	3:19:54 AM	Recipe started at 3:19 AM
7/3/2010	3:19:54 AM	H2 valve closed
7/3/2010	3:19:54 AM	BCl3 valve closed
7/3/2010	3:19:54 AM	PH3 valve closed
7/3/2010	3:19:54 AM	SiCl4 pre valve closed
7/3/2010	3:19:54 AM	SiCl4 post valve closed
7/3/2010	3:19:54 AM	Main Vac valve closed
7/3/2010	3:19:54 AM	Bypass valve closed
7/3/2010	3:19:54 AM	Bubbler valve closed
7/3/2010	3:19:54 AM	Helium valve opened
7/3/2010	3:19:54 AM	Helium MFC set to  500.000000
7/3/2010	3:19:54 AM	H2 MFC set to  0.000000
7/3/2010	3:19:54 AM	BCl3 MFC set to  0.000000
7/3/2010	3:19:54 AM	PHl3 MFC set to  0.000000
7/3/2010	3:19:54 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:19:54 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:19:54 AM	Tube furnace set to 0
7/3/2010	3:21:10 AM	Helium valve closed
7/3/2010	3:21:10 AM	H2 valve closed
7/3/2010	3:21:10 AM	BCl3 valve closed
7/3/2010	3:21:10 AM	PH3 valve closed
7/3/2010	3:21:10 AM	SiCl4 pre valve closed
7/3/2010	3:21:10 AM	SiCl4 post valve closed
7/3/2010	3:21:10 AM	Main Vac valve closed
7/3/2010	3:21:10 AM	Bypass valve closed
7/3/2010	3:21:10 AM	Bubbler valve closed
7/3/2010	3:21:10 AM	Helium MFC set to  0.000000
7/3/2010	3:21:10 AM	H2 MFC set to  0.000000
7/3/2010	3:21:10 AM	BCl3 MFC set to  0.000000
7/3/2010	3:21:10 AM	PHl3 MFC set to  0.000000
7/3/2010	3:21:10 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:21:10 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:21:10 AM	Tube furnace set to 0
7/3/2010	3:21:10 AM	Run finished at 3:21 AM
7/3/2010	3:21:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	3:27:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	3:27:54 AM	Recipe started at 3:27 AM
7/3/2010	3:27:54 AM	Helium valve closed
7/3/2010	3:27:54 AM	H2 valve closed
7/3/2010	3:27:54 AM	BCl3 valve closed
7/3/2010	3:27:54 AM	PH3 valve closed
7/3/2010	3:27:54 AM	SiCl4 pre valve closed
7/3/2010	3:27:54 AM	SiCl4 post valve closed
7/3/2010	3:27:54 AM	Main Vac valve closed
7/3/2010	3:27:54 AM	Bubbler valve closed
7/3/2010	3:27:54 AM	Bypass valve opened
7/3/2010	3:27:54 AM	Helium MFC set to  0.000000
7/3/2010	3:27:54 AM	H2 MFC set to  0.000000
7/3/2010	3:27:54 AM	BCl3 MFC set to  0.000000
7/3/2010	3:27:54 AM	PHl3 MFC set to  0.000000
7/3/2010	3:27:54 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:27:54 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:27:54 AM	Tube furnace set to 0
7/3/2010	3:28:41 AM	Helium valve closed
7/3/2010	3:28:41 AM	H2 valve closed
7/3/2010	3:28:41 AM	BCl3 valve closed
7/3/2010	3:28:41 AM	PH3 valve closed
7/3/2010	3:28:41 AM	SiCl4 pre valve closed
7/3/2010	3:28:41 AM	SiCl4 post valve closed
7/3/2010	3:28:41 AM	Bubbler valve closed
7/3/2010	3:28:41 AM	Main Vac valve opened
7/3/2010	3:28:41 AM	Bypass valve opened
7/3/2010	3:28:41 AM	Helium MFC set to  0.000000
7/3/2010	3:28:41 AM	H2 MFC set to  0.000000
7/3/2010	3:28:41 AM	BCl3 MFC set to  0.000000
7/3/2010	3:28:41 AM	PHl3 MFC set to  0.000000
7/3/2010	3:28:41 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:28:41 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:28:41 AM	Tube furnace set to 0
7/3/2010	3:28:42 AM	Run finished at 3:28 AM
7/3/2010	3:28:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	3:29:00 AM	Recipe started at 3:28 AM
7/3/2010	3:29:00 AM	H2 valve closed
7/3/2010	3:29:00 AM	BCl3 valve closed
7/3/2010	3:29:00 AM	PH3 valve closed
7/3/2010	3:29:00 AM	SiCl4 pre valve closed
7/3/2010	3:29:00 AM	SiCl4 post valve closed
7/3/2010	3:29:00 AM	Main Vac valve closed
7/3/2010	3:29:00 AM	Bypass valve closed
7/3/2010	3:29:00 AM	Bubbler valve closed
7/3/2010	3:29:00 AM	Helium valve opened
7/3/2010	3:29:00 AM	Helium MFC set to  500.000000
7/3/2010	3:29:00 AM	H2 MFC set to  0.000000
7/3/2010	3:29:00 AM	BCl3 MFC set to  0.000000
7/3/2010	3:29:00 AM	PHl3 MFC set to  0.000000
7/3/2010	3:29:00 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:29:00 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:29:00 AM	Tube furnace set to 80
7/3/2010	3:29:42 AM	Helium valve closed
7/3/2010	3:29:42 AM	H2 valve closed
7/3/2010	3:29:42 AM	BCl3 valve closed
7/3/2010	3:29:42 AM	PH3 valve closed
7/3/2010	3:29:42 AM	SiCl4 pre valve closed
7/3/2010	3:29:42 AM	SiCl4 post valve closed
7/3/2010	3:29:42 AM	Main Vac valve closed
7/3/2010	3:29:42 AM	Bypass valve closed
7/3/2010	3:29:42 AM	Bubbler valve closed
7/3/2010	3:29:42 AM	Helium MFC set to  0.000000
7/3/2010	3:29:42 AM	H2 MFC set to  0.000000
7/3/2010	3:29:42 AM	BCl3 MFC set to  0.000000
7/3/2010	3:29:42 AM	PHl3 MFC set to  0.000000
7/3/2010	3:29:42 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:29:42 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:29:42 AM	Tube furnace set to 80
7/3/2010	3:29:57 AM	Helium valve closed
7/3/2010	3:29:57 AM	H2 valve closed
7/3/2010	3:29:57 AM	BCl3 valve closed
7/3/2010	3:29:57 AM	PH3 valve closed
7/3/2010	3:29:57 AM	SiCl4 pre valve closed
7/3/2010	3:29:57 AM	SiCl4 post valve closed
7/3/2010	3:29:57 AM	Main Vac valve closed
7/3/2010	3:29:57 AM	Bubbler valve closed
7/3/2010	3:29:57 AM	Bypass valve opened
7/3/2010	3:29:57 AM	Helium MFC set to  0.000000
7/3/2010	3:29:57 AM	H2 MFC set to  0.000000
7/3/2010	3:29:57 AM	BCl3 MFC set to  0.000000
7/3/2010	3:29:57 AM	PHl3 MFC set to  0.000000
7/3/2010	3:29:57 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:29:57 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:29:57 AM	Tube furnace set to 80
7/3/2010	3:30:26 AM	Helium valve closed
7/3/2010	3:30:26 AM	H2 valve closed
7/3/2010	3:30:26 AM	BCl3 valve closed
7/3/2010	3:30:26 AM	PH3 valve closed
7/3/2010	3:30:26 AM	SiCl4 pre valve closed
7/3/2010	3:30:26 AM	SiCl4 post valve closed
7/3/2010	3:30:26 AM	Bubbler valve closed
7/3/2010	3:30:26 AM	Main Vac valve opened
7/3/2010	3:30:26 AM	Bypass valve opened
7/3/2010	3:30:26 AM	Helium MFC set to  0.000000
7/3/2010	3:30:26 AM	H2 MFC set to  0.000000
7/3/2010	3:30:26 AM	BCl3 MFC set to  0.000000
7/3/2010	3:30:26 AM	PHl3 MFC set to  0.000000
7/3/2010	3:30:26 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:30:26 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:30:26 AM	Tube furnace set to 80
7/3/2010	3:33:26 AM	H2 valve closed
7/3/2010	3:33:26 AM	BCl3 valve closed
7/3/2010	3:33:26 AM	PH3 valve closed
7/3/2010	3:33:26 AM	SiCl4 pre valve closed
7/3/2010	3:33:26 AM	SiCl4 post valve closed
7/3/2010	3:33:26 AM	Main Vac valve closed
7/3/2010	3:33:26 AM	Bypass valve closed
7/3/2010	3:33:26 AM	Bubbler valve closed
7/3/2010	3:33:26 AM	Helium valve opened
7/3/2010	3:33:26 AM	Helium MFC set to  500.000000
7/3/2010	3:33:26 AM	H2 MFC set to  0.000000
7/3/2010	3:33:26 AM	BCl3 MFC set to  0.000000
7/3/2010	3:33:26 AM	PHl3 MFC set to  0.000000
7/3/2010	3:33:26 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:33:26 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:33:26 AM	Tube furnace set to 80
7/3/2010	3:34:07 AM	Helium valve closed
7/3/2010	3:34:07 AM	H2 valve closed
7/3/2010	3:34:07 AM	BCl3 valve closed
7/3/2010	3:34:07 AM	PH3 valve closed
7/3/2010	3:34:07 AM	SiCl4 pre valve closed
7/3/2010	3:34:07 AM	SiCl4 post valve closed
7/3/2010	3:34:07 AM	Main Vac valve closed
7/3/2010	3:34:07 AM	Bypass valve closed
7/3/2010	3:34:07 AM	Bubbler valve closed
7/3/2010	3:34:07 AM	Helium MFC set to  0.000000
7/3/2010	3:34:07 AM	H2 MFC set to  0.000000
7/3/2010	3:34:07 AM	BCl3 MFC set to  0.000000
7/3/2010	3:34:07 AM	PHl3 MFC set to  0.000000
7/3/2010	3:34:07 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:34:07 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:34:08 AM	Tube furnace set to 80
7/3/2010	3:34:23 AM	Helium valve closed
7/3/2010	3:34:23 AM	H2 valve closed
7/3/2010	3:34:23 AM	BCl3 valve closed
7/3/2010	3:34:23 AM	PH3 valve closed
7/3/2010	3:34:23 AM	SiCl4 pre valve closed
7/3/2010	3:34:23 AM	SiCl4 post valve closed
7/3/2010	3:34:23 AM	Main Vac valve closed
7/3/2010	3:34:23 AM	Bubbler valve closed
7/3/2010	3:34:23 AM	Bypass valve opened
7/3/2010	3:34:23 AM	Helium MFC set to  0.000000
7/3/2010	3:34:23 AM	H2 MFC set to  0.000000
7/3/2010	3:34:23 AM	BCl3 MFC set to  0.000000
7/3/2010	3:34:23 AM	PHl3 MFC set to  0.000000
7/3/2010	3:34:23 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:34:23 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:34:23 AM	Tube furnace set to 80
7/3/2010	3:34:51 AM	Helium valve closed
7/3/2010	3:34:51 AM	H2 valve closed
7/3/2010	3:34:51 AM	BCl3 valve closed
7/3/2010	3:34:51 AM	PH3 valve closed
7/3/2010	3:34:51 AM	SiCl4 pre valve closed
7/3/2010	3:34:51 AM	SiCl4 post valve closed
7/3/2010	3:34:51 AM	Bubbler valve closed
7/3/2010	3:34:51 AM	Main Vac valve opened
7/3/2010	3:34:51 AM	Bypass valve opened
7/3/2010	3:34:51 AM	Helium MFC set to  0.000000
7/3/2010	3:34:51 AM	H2 MFC set to  0.000000
7/3/2010	3:34:51 AM	BCl3 MFC set to  0.000000
7/3/2010	3:34:51 AM	PHl3 MFC set to  0.000000
7/3/2010	3:34:51 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:34:51 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:34:51 AM	Tube furnace set to 80
7/3/2010	3:37:51 AM	H2 valve closed
7/3/2010	3:37:51 AM	BCl3 valve closed
7/3/2010	3:37:51 AM	PH3 valve closed
7/3/2010	3:37:51 AM	SiCl4 pre valve closed
7/3/2010	3:37:51 AM	SiCl4 post valve closed
7/3/2010	3:37:51 AM	Main Vac valve closed
7/3/2010	3:37:51 AM	Bypass valve closed
7/3/2010	3:37:51 AM	Bubbler valve closed
7/3/2010	3:37:51 AM	Helium valve opened
7/3/2010	3:37:51 AM	Helium MFC set to  500.000000
7/3/2010	3:37:51 AM	H2 MFC set to  0.000000
7/3/2010	3:37:51 AM	BCl3 MFC set to  0.000000
7/3/2010	3:37:51 AM	PHl3 MFC set to  0.000000
7/3/2010	3:37:51 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:37:51 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:37:51 AM	Tube furnace set to 80
7/3/2010	3:38:32 AM	Helium valve closed
7/3/2010	3:38:32 AM	H2 valve closed
7/3/2010	3:38:32 AM	BCl3 valve closed
7/3/2010	3:38:32 AM	PH3 valve closed
7/3/2010	3:38:32 AM	SiCl4 pre valve closed
7/3/2010	3:38:32 AM	SiCl4 post valve closed
7/3/2010	3:38:32 AM	Main Vac valve closed
7/3/2010	3:38:32 AM	Bypass valve closed
7/3/2010	3:38:32 AM	Bubbler valve closed
7/3/2010	3:38:32 AM	Helium MFC set to  0.000000
7/3/2010	3:38:32 AM	H2 MFC set to  0.000000
7/3/2010	3:38:32 AM	BCl3 MFC set to  0.000000
7/3/2010	3:38:32 AM	PHl3 MFC set to  0.000000
7/3/2010	3:38:32 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:38:32 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:38:32 AM	Tube furnace set to 80
7/3/2010	3:38:47 AM	Helium valve closed
7/3/2010	3:38:47 AM	H2 valve closed
7/3/2010	3:38:47 AM	BCl3 valve closed
7/3/2010	3:38:47 AM	PH3 valve closed
7/3/2010	3:38:47 AM	SiCl4 pre valve closed
7/3/2010	3:38:47 AM	SiCl4 post valve closed
7/3/2010	3:38:47 AM	Main Vac valve closed
7/3/2010	3:38:47 AM	Bubbler valve closed
7/3/2010	3:38:47 AM	Bypass valve opened
7/3/2010	3:38:47 AM	Helium MFC set to  0.000000
7/3/2010	3:38:47 AM	H2 MFC set to  0.000000
7/3/2010	3:38:47 AM	BCl3 MFC set to  0.000000
7/3/2010	3:38:47 AM	PHl3 MFC set to  0.000000
7/3/2010	3:38:47 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:38:47 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:38:48 AM	Tube furnace set to 80
7/3/2010	3:39:15 AM	Helium valve closed
7/3/2010	3:39:15 AM	H2 valve closed
7/3/2010	3:39:15 AM	BCl3 valve closed
7/3/2010	3:39:15 AM	PH3 valve closed
7/3/2010	3:39:15 AM	SiCl4 pre valve closed
7/3/2010	3:39:15 AM	SiCl4 post valve closed
7/3/2010	3:39:15 AM	Bubbler valve closed
7/3/2010	3:39:15 AM	Main Vac valve opened
7/3/2010	3:39:15 AM	Bypass valve opened
7/3/2010	3:39:15 AM	Helium MFC set to  0.000000
7/3/2010	3:39:15 AM	H2 MFC set to  0.000000
7/3/2010	3:39:15 AM	BCl3 MFC set to  0.000000
7/3/2010	3:39:15 AM	PHl3 MFC set to  0.000000
7/3/2010	3:39:15 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:39:15 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:39:15 AM	Tube furnace set to 80
7/3/2010	3:42:15 AM	Helium valve closed
7/3/2010	3:42:15 AM	H2 valve closed
7/3/2010	3:42:15 AM	BCl3 valve closed
7/3/2010	3:42:15 AM	PH3 valve closed
7/3/2010	3:42:15 AM	SiCl4 pre valve closed
7/3/2010	3:42:15 AM	SiCl4 post valve closed
7/3/2010	3:42:15 AM	Bubbler valve closed
7/3/2010	3:42:15 AM	Main Vac valve opened
7/3/2010	3:42:15 AM	Bypass valve opened
7/3/2010	3:42:15 AM	Helium MFC set to  0.000000
7/3/2010	3:42:15 AM	H2 MFC set to  0.000000
7/3/2010	3:42:15 AM	BCl3 MFC set to  0.000000
7/3/2010	3:42:15 AM	PHl3 MFC set to  0.000000
7/3/2010	3:42:15 AM	SiCl4 MFC set to  0.000000
7/3/2010	3:42:15 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	3:42:16 AM	Tube furnace set to 0
7/3/2010	3:42:17 AM	Run finished at 3:42 AM
7/3/2010	4:44:59 AM	Bypass valve closed
7/3/2010	4:45:00 AM	Main Vac valve closed
7/3/2010	4:46:27 AM	Recipe started at 4:46 AM
7/3/2010	4:46:27 AM	Helium valve closed
7/3/2010	4:46:27 AM	BCl3 valve closed
7/3/2010	4:46:27 AM	PH3 valve closed
7/3/2010	4:46:27 AM	SiCl4 pre valve closed
7/3/2010	4:46:27 AM	SiCl4 post valve closed
7/3/2010	4:46:27 AM	Main Vac valve closed
7/3/2010	4:46:27 AM	Bypass valve closed
7/3/2010	4:46:27 AM	Bubbler valve closed
7/3/2010	4:46:27 AM	H2 valve opened
7/3/2010	4:46:27 AM	Helium MFC set to  0.000000
7/3/2010	4:46:27 AM	H2 MFC set to  500.000000
7/3/2010	4:46:27 AM	BCl3 MFC set to  0.000000
7/3/2010	4:46:27 AM	PHl3 MFC set to  0.000000
7/3/2010	4:46:27 AM	SiCl4 MFC set to  0.000000
7/3/2010	4:46:27 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	4:46:27 AM	Tube furnace set to 0
7/3/2010	4:47:46 AM	Helium valve closed
7/3/2010	4:47:46 AM	BCl3 valve closed
7/3/2010	4:47:46 AM	PH3 valve closed
7/3/2010	4:47:46 AM	SiCl4 pre valve closed
7/3/2010	4:47:46 AM	SiCl4 post valve closed
7/3/2010	4:47:46 AM	Main Vac valve closed
7/3/2010	4:47:46 AM	Bypass valve closed
7/3/2010	4:47:46 AM	H2 valve opened
7/3/2010	4:47:46 AM	Bubbler valve opened
7/3/2010	4:47:46 AM	Helium MFC set to  0.000000
7/3/2010	4:47:46 AM	H2 MFC set to  500.000000
7/3/2010	4:47:46 AM	BCl3 MFC set to  0.000000
7/3/2010	4:47:46 AM	PHl3 MFC set to  0.000000
7/3/2010	4:47:46 AM	SiCl4 MFC set to  0.000000
7/3/2010	4:47:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	4:47:46 AM	Tube furnace set to 1000
7/3/2010	5:07:46 AM	Helium valve closed
7/3/2010	5:07:46 AM	BCl3 valve closed
7/3/2010	5:07:46 AM	Main Vac valve closed
7/3/2010	5:07:46 AM	Bypass valve closed
7/3/2010	5:07:46 AM	H2 valve opened
7/3/2010	5:07:46 AM	PH3 valve opened
7/3/2010	5:07:46 AM	SiCl4 pre valve opened
7/3/2010	5:07:46 AM	SiCl4 post valve opened
7/3/2010	5:07:46 AM	Bubbler valve opened
7/3/2010	5:07:46 AM	Helium MFC set to  0.000000
7/3/2010	5:07:46 AM	H2 MFC set to  500.000000
7/3/2010	5:07:46 AM	BCl3 MFC set to  0.000000
7/3/2010	5:07:46 AM	PHl3 MFC set to  1.000000
7/3/2010	5:07:46 AM	SiCl4 MFC set to  50.000000
7/3/2010	5:07:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:07:46 AM	Tube furnace set to 1000
7/3/2010	5:19:46 AM	H2 valve closed
7/3/2010	5:19:46 AM	BCl3 valve closed
7/3/2010	5:19:46 AM	PH3 valve closed
7/3/2010	5:19:46 AM	SiCl4 pre valve closed
7/3/2010	5:19:46 AM	SiCl4 post valve closed
7/3/2010	5:19:46 AM	Main Vac valve closed
7/3/2010	5:19:46 AM	Bypass valve closed
7/3/2010	5:19:46 AM	Helium valve opened
7/3/2010	5:19:46 AM	Bubbler valve opened
7/3/2010	5:19:46 AM	Helium MFC set to  500.000000
7/3/2010	5:19:46 AM	H2 MFC set to  0.000000
7/3/2010	5:19:46 AM	BCl3 MFC set to  0.000000
7/3/2010	5:19:46 AM	PHl3 MFC set to  0.000000
7/3/2010	5:19:46 AM	SiCl4 MFC set to  0.000000
7/3/2010	5:19:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:19:46 AM	Tube furnace set to 0
7/3/2010	5:39:46 AM	Helium valve closed
7/3/2010	5:39:46 AM	H2 valve closed
7/3/2010	5:39:46 AM	BCl3 valve closed
7/3/2010	5:39:46 AM	PH3 valve closed
7/3/2010	5:39:46 AM	SiCl4 pre valve closed
7/3/2010	5:39:46 AM	SiCl4 post valve closed
7/3/2010	5:39:46 AM	Main Vac valve closed
7/3/2010	5:39:46 AM	Bypass valve closed
7/3/2010	5:39:46 AM	Bubbler valve closed
7/3/2010	5:39:46 AM	Helium MFC set to  0.000000
7/3/2010	5:39:46 AM	H2 MFC set to  0.000000
7/3/2010	5:39:46 AM	BCl3 MFC set to  0.000000
7/3/2010	5:39:46 AM	PHl3 MFC set to  0.000000
7/3/2010	5:39:46 AM	SiCl4 MFC set to  0.000000
7/3/2010	5:39:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:39:46 AM	Tube furnace set to 0
7/3/2010	5:39:47 AM	Run finished at 5:39 AM
7/3/2010	5:53:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	5:53:29 AM	Recipe started at 5:53 AM
7/3/2010	5:53:29 AM	Helium valve closed
7/3/2010	5:53:29 AM	H2 valve closed
7/3/2010	5:53:29 AM	BCl3 valve closed
7/3/2010	5:53:29 AM	PH3 valve closed
7/3/2010	5:53:29 AM	SiCl4 pre valve closed
7/3/2010	5:53:29 AM	SiCl4 post valve closed
7/3/2010	5:53:29 AM	Main Vac valve closed
7/3/2010	5:53:29 AM	Bubbler valve closed
7/3/2010	5:53:29 AM	Bypass valve opened
7/3/2010	5:53:29 AM	Helium MFC set to  0.000000
7/3/2010	5:53:29 AM	H2 MFC set to  0.000000
7/3/2010	5:53:29 AM	BCl3 MFC set to  0.000000
7/3/2010	5:53:29 AM	PHl3 MFC set to  0.000000
7/3/2010	5:53:29 AM	SiCl4 MFC set to  0.000000
7/3/2010	5:53:29 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:53:29 AM	Tube furnace set to 0
7/3/2010	5:54:18 AM	Helium valve closed
7/3/2010	5:54:18 AM	H2 valve closed
7/3/2010	5:54:18 AM	BCl3 valve closed
7/3/2010	5:54:18 AM	PH3 valve closed
7/3/2010	5:54:18 AM	SiCl4 pre valve closed
7/3/2010	5:54:18 AM	SiCl4 post valve closed
7/3/2010	5:54:18 AM	Bubbler valve closed
7/3/2010	5:54:18 AM	Main Vac valve opened
7/3/2010	5:54:18 AM	Bypass valve opened
7/3/2010	5:54:18 AM	Helium MFC set to  0.000000
7/3/2010	5:54:18 AM	H2 MFC set to  0.000000
7/3/2010	5:54:18 AM	BCl3 MFC set to  0.000000
7/3/2010	5:54:18 AM	PHl3 MFC set to  0.000000
7/3/2010	5:54:18 AM	SiCl4 MFC set to  0.000000
7/3/2010	5:54:18 AM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:54:18 AM	Tube furnace set to 0
7/3/2010	5:54:19 AM	Run finished at 5:54 AM
7/3/2010	5:54:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	2:35:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	2:35:16 PM	Recipe started at 2:35 PM
7/3/2010	2:35:16 PM	H2 valve closed
7/3/2010	2:35:16 PM	BCl3 valve closed
7/3/2010	2:35:16 PM	PH3 valve closed
7/3/2010	2:35:16 PM	SiCl4 pre valve closed
7/3/2010	2:35:16 PM	SiCl4 post valve closed
7/3/2010	2:35:16 PM	Main Vac valve closed
7/3/2010	2:35:16 PM	Bypass valve closed
7/3/2010	2:35:16 PM	Bubbler valve closed
7/3/2010	2:35:16 PM	Helium valve opened
7/3/2010	2:35:16 PM	Helium MFC set to  500.000000
7/3/2010	2:35:16 PM	H2 MFC set to  0.000000
7/3/2010	2:35:16 PM	BCl3 MFC set to  0.000000
7/3/2010	2:35:16 PM	PHl3 MFC set to  0.000000
7/3/2010	2:35:16 PM	SiCl4 MFC set to  0.000000
7/3/2010	2:35:16 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:35:16 PM	Tube furnace set to 0
7/3/2010	2:36:36 PM	Helium valve closed
7/3/2010	2:36:36 PM	H2 valve closed
7/3/2010	2:36:36 PM	BCl3 valve closed
7/3/2010	2:36:36 PM	PH3 valve closed
7/3/2010	2:36:36 PM	SiCl4 pre valve closed
7/3/2010	2:36:36 PM	SiCl4 post valve closed
7/3/2010	2:36:36 PM	Main Vac valve closed
7/3/2010	2:36:36 PM	Bypass valve closed
7/3/2010	2:36:36 PM	Bubbler valve closed
7/3/2010	2:36:36 PM	Helium MFC set to  0.000000
7/3/2010	2:36:36 PM	H2 MFC set to  0.000000
7/3/2010	2:36:36 PM	BCl3 MFC set to  0.000000
7/3/2010	2:36:36 PM	PHl3 MFC set to  0.000000
7/3/2010	2:36:36 PM	SiCl4 MFC set to  0.000000
7/3/2010	2:36:36 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	2:36:36 PM	Tube furnace set to 0
7/3/2010	2:36:36 PM	Run finished at 2:36 PM
7/3/2010	2:36:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	2:50:37 PM	Program exited cleanly
7/3/2010	3:59:21 PM	Program started normally
7/3/2010	3:59:21 PM	Helium valve closed
7/3/2010	3:59:21 PM	H2 valve closed
7/3/2010	3:59:21 PM	BCl3 valve closed
7/3/2010	3:59:21 PM	PH3 valve closed
7/3/2010	3:59:22 PM	SiCl4 pre valve closed
7/3/2010	3:59:22 PM	SiCl4 post valve closed
7/3/2010	3:59:22 PM	Main Vac valve closed
7/3/2010	3:59:22 PM	Bypass valve closed
7/3/2010	3:59:22 PM	Bubbler valve closed
7/3/2010	3:59:22 PM	Helium MFC set to  0.000000
7/3/2010	3:59:22 PM	H2 MFC set to  0.000000
7/3/2010	3:59:22 PM	BCl3 MFC set to  0.000000
7/3/2010	3:59:22 PM	PHl3 MFC set to  0.000000
7/3/2010	3:59:22 PM	SiCl4 MFC set to  0.000000
7/3/2010	3:59:22 PM	Bypass solenoid MFC set to  760.000000
7/3/2010	3:59:22 PM	Tube furnace set to 0
7/3/2010	3:59:49 PM	Bypass valve opened
7/3/2010	4:09:29 PM	Bypass valve closed
7/3/2010	4:55:18 PM	Bypass valve opened
7/3/2010	4:56:29 PM	Main Vac valve opened
7/3/2010	4:57:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	4:57:09 PM	Recipe started at 4:57 PM
7/3/2010	4:57:09 PM	H2 valve closed
7/3/2010	4:57:09 PM	BCl3 valve closed
7/3/2010	4:57:09 PM	PH3 valve closed
7/3/2010	4:57:09 PM	SiCl4 pre valve closed
7/3/2010	4:57:09 PM	SiCl4 post valve closed
7/3/2010	4:57:09 PM	Main Vac valve closed
7/3/2010	4:57:09 PM	Bypass valve closed
7/3/2010	4:57:09 PM	Bubbler valve closed
7/3/2010	4:57:09 PM	Helium valve opened
7/3/2010	4:57:09 PM	Helium MFC set to  500.000000
7/3/2010	4:57:09 PM	H2 MFC set to  0.000000
7/3/2010	4:57:09 PM	BCl3 MFC set to  0.000000
7/3/2010	4:57:09 PM	PHl3 MFC set to  0.000000
7/3/2010	4:57:09 PM	SiCl4 MFC set to  0.000000
7/3/2010	4:57:09 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	4:57:09 PM	Tube furnace set to 0
7/3/2010	4:58:54 PM	Run aborted at 4:58 PM
7/3/2010	4:58:54 PM	Helium valve closed
7/3/2010	4:58:54 PM	H2 valve closed
7/3/2010	4:58:54 PM	BCl3 valve closed
7/3/2010	4:58:54 PM	PH3 valve closed
7/3/2010	4:58:54 PM	SiCl4 pre valve closed
7/3/2010	4:58:54 PM	SiCl4 post valve closed
7/3/2010	4:58:54 PM	Bypass valve closed
7/3/2010	4:58:54 PM	Main Vac valve closed
7/3/2010	4:58:54 PM	Bubbler valve closed
7/3/2010	4:58:54 PM	Helium MFC set to  0.000000
7/3/2010	4:58:54 PM	H2 MFC set to  0.000000
7/3/2010	4:58:54 PM	BCl3 MFC set to  0.000000
7/3/2010	4:58:54 PM	PHl3 MFC set to  0.000000
7/3/2010	4:58:54 PM	SiCl4 MFC set to  0.000000
7/3/2010	4:58:54 PM	Tube furnace set to 0
7/3/2010	4:58:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	4:58:56 PM	Bypass valve opened
7/3/2010	4:59:21 PM	Main Vac valve opened
7/3/2010	5:02:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:02:21 PM	Recipe started at 5:02 PM
7/3/2010	5:02:21 PM	H2 valve closed
7/3/2010	5:02:21 PM	BCl3 valve closed
7/3/2010	5:02:21 PM	PH3 valve closed
7/3/2010	5:02:21 PM	SiCl4 pre valve closed
7/3/2010	5:02:21 PM	SiCl4 post valve closed
7/3/2010	5:02:21 PM	Main Vac valve closed
7/3/2010	5:02:21 PM	Bypass valve closed
7/3/2010	5:02:21 PM	Bubbler valve closed
7/3/2010	5:02:21 PM	Helium valve opened
7/3/2010	5:02:21 PM	Helium MFC set to  500.000000
7/3/2010	5:02:21 PM	H2 MFC set to  0.000000
7/3/2010	5:02:21 PM	BCl3 MFC set to  0.000000
7/3/2010	5:02:21 PM	PHl3 MFC set to  0.000000
7/3/2010	5:02:21 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:02:21 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:02:22 PM	Tube furnace set to 0
7/3/2010	5:02:40 PM	Helium valve closed
7/3/2010	5:02:40 PM	H2 valve closed
7/3/2010	5:02:40 PM	BCl3 valve closed
7/3/2010	5:02:40 PM	PH3 valve closed
7/3/2010	5:02:40 PM	SiCl4 pre valve closed
7/3/2010	5:02:40 PM	SiCl4 post valve closed
7/3/2010	5:02:40 PM	Main Vac valve closed
7/3/2010	5:02:40 PM	Bypass valve closed
7/3/2010	5:02:40 PM	Bubbler valve closed
7/3/2010	5:02:40 PM	Helium MFC set to  0.000000
7/3/2010	5:02:40 PM	H2 MFC set to  0.000000
7/3/2010	5:02:40 PM	BCl3 MFC set to  0.000000
7/3/2010	5:02:40 PM	PHl3 MFC set to  0.000000
7/3/2010	5:02:40 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:02:40 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:02:40 PM	Tube furnace set to 0
7/3/2010	5:02:40 PM	Run finished at 5:02 PM
7/3/2010	5:02:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:04:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:04:02 PM	Recipe started at 5:04 PM
7/3/2010	5:04:02 PM	H2 valve closed
7/3/2010	5:04:02 PM	BCl3 valve closed
7/3/2010	5:04:02 PM	PH3 valve closed
7/3/2010	5:04:02 PM	SiCl4 pre valve closed
7/3/2010	5:04:02 PM	SiCl4 post valve closed
7/3/2010	5:04:02 PM	Main Vac valve closed
7/3/2010	5:04:02 PM	Bypass valve closed
7/3/2010	5:04:02 PM	Bubbler valve closed
7/3/2010	5:04:02 PM	Helium valve opened
7/3/2010	5:04:02 PM	Helium MFC set to  500.000000
7/3/2010	5:04:02 PM	H2 MFC set to  0.000000
7/3/2010	5:04:02 PM	BCl3 MFC set to  0.000000
7/3/2010	5:04:02 PM	PHl3 MFC set to  0.000000
7/3/2010	5:04:02 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:04:02 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:04:02 PM	Tube furnace set to 0
7/3/2010	5:04:02 PM	Run aborted at 5:04 PM
7/3/2010	5:04:02 PM	Helium valve closed
7/3/2010	5:04:02 PM	H2 valve closed
7/3/2010	5:04:02 PM	BCl3 valve closed
7/3/2010	5:04:02 PM	PH3 valve closed
7/3/2010	5:04:02 PM	SiCl4 pre valve closed
7/3/2010	5:04:02 PM	SiCl4 post valve closed
7/3/2010	5:04:02 PM	Bypass valve closed
7/3/2010	5:04:02 PM	Main Vac valve closed
7/3/2010	5:04:02 PM	Bubbler valve closed
7/3/2010	5:04:02 PM	Helium MFC set to  0.000000
7/3/2010	5:04:02 PM	H2 MFC set to  0.000000
7/3/2010	5:04:02 PM	BCl3 MFC set to  0.000000
7/3/2010	5:04:02 PM	PHl3 MFC set to  0.000000
7/3/2010	5:04:02 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:04:03 PM	Tube furnace set to 0
7/3/2010	5:04:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:04:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	5:04:05 PM	Recipe started at 5:04 PM
7/3/2010	5:04:05 PM	Helium valve closed
7/3/2010	5:04:05 PM	H2 valve closed
7/3/2010	5:04:05 PM	BCl3 valve closed
7/3/2010	5:04:05 PM	PH3 valve closed
7/3/2010	5:04:05 PM	SiCl4 pre valve closed
7/3/2010	5:04:05 PM	SiCl4 post valve closed
7/3/2010	5:04:05 PM	Main Vac valve closed
7/3/2010	5:04:05 PM	Bubbler valve closed
7/3/2010	5:04:05 PM	Bypass valve opened
7/3/2010	5:04:05 PM	Helium MFC set to  0.000000
7/3/2010	5:04:05 PM	H2 MFC set to  0.000000
7/3/2010	5:04:05 PM	BCl3 MFC set to  0.000000
7/3/2010	5:04:05 PM	PHl3 MFC set to  0.000000
7/3/2010	5:04:05 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:04:05 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:04:05 PM	Tube furnace set to 0
7/3/2010	5:05:14 PM	Helium valve closed
7/3/2010	5:05:14 PM	H2 valve closed
7/3/2010	5:05:14 PM	BCl3 valve closed
7/3/2010	5:05:14 PM	PH3 valve closed
7/3/2010	5:05:14 PM	SiCl4 pre valve closed
7/3/2010	5:05:14 PM	SiCl4 post valve closed
7/3/2010	5:05:14 PM	Bubbler valve closed
7/3/2010	5:05:14 PM	Main Vac valve opened
7/3/2010	5:05:14 PM	Bypass valve opened
7/3/2010	5:05:14 PM	Helium MFC set to  0.000000
7/3/2010	5:05:14 PM	H2 MFC set to  0.000000
7/3/2010	5:05:14 PM	BCl3 MFC set to  0.000000
7/3/2010	5:05:14 PM	PHl3 MFC set to  0.000000
7/3/2010	5:05:14 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:05:14 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:05:14 PM	Tube furnace set to 0
7/3/2010	5:05:14 PM	Run finished at 5:05 PM
7/3/2010	5:05:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	5:07:27 PM	Helium MFC set to  100.000000
7/3/2010	5:07:28 PM	Helium valve opened
7/3/2010	5:14:49 PM	Program started after a nonstandard shutdown
7/3/2010	5:14:49 PM	Helium valve closed
7/3/2010	5:14:49 PM	H2 valve closed
7/3/2010	5:14:49 PM	BCl3 valve closed
7/3/2010	5:14:49 PM	PH3 valve closed
7/3/2010	5:14:49 PM	SiCl4 pre valve closed
7/3/2010	5:14:49 PM	SiCl4 post valve closed
7/3/2010	5:14:49 PM	Main Vac valve closed
7/3/2010	5:14:49 PM	Bypass valve closed
7/3/2010	5:14:49 PM	Bubbler valve closed
7/3/2010	5:14:49 PM	Helium MFC set to  0.000000
7/3/2010	5:14:49 PM	H2 MFC set to  0.000000
7/3/2010	5:14:49 PM	BCl3 MFC set to  0.000000
7/3/2010	5:14:49 PM	PHl3 MFC set to  0.000000
7/3/2010	5:14:49 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:14:49 PM	Bypass solenoid MFC set to  760.000000
7/3/2010	5:14:49 PM	Tube furnace set to 0
7/3/2010	5:14:50 PM	Bypass valve opened
7/3/2010	5:14:51 PM	Main Vac valve opened
7/3/2010	5:15:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	5:15:41 PM	Recipe started at 5:15 PM
7/3/2010	5:15:41 PM	Helium valve closed
7/3/2010	5:15:41 PM	H2 valve closed
7/3/2010	5:15:41 PM	BCl3 valve closed
7/3/2010	5:15:41 PM	PH3 valve closed
7/3/2010	5:15:41 PM	SiCl4 pre valve closed
7/3/2010	5:15:41 PM	SiCl4 post valve closed
7/3/2010	5:15:41 PM	Main Vac valve closed
7/3/2010	5:15:41 PM	Bubbler valve closed
7/3/2010	5:15:41 PM	Bypass valve opened
7/3/2010	5:15:41 PM	Helium MFC set to  0.000000
7/3/2010	5:15:41 PM	H2 MFC set to  0.000000
7/3/2010	5:15:41 PM	BCl3 MFC set to  0.000000
7/3/2010	5:15:41 PM	PHl3 MFC set to  0.000000
7/3/2010	5:15:41 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:15:41 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:15:41 PM	Tube furnace set to 0
7/3/2010	5:15:41 PM	Helium valve closed
7/3/2010	5:15:41 PM	H2 valve closed
7/3/2010	5:15:41 PM	BCl3 valve closed
7/3/2010	5:15:41 PM	PH3 valve closed
7/3/2010	5:15:41 PM	SiCl4 pre valve closed
7/3/2010	5:15:41 PM	SiCl4 post valve closed
7/3/2010	5:15:41 PM	Bubbler valve closed
7/3/2010	5:15:41 PM	Main Vac valve opened
7/3/2010	5:15:41 PM	Bypass valve opened
7/3/2010	5:15:41 PM	Helium MFC set to  0.000000
7/3/2010	5:15:41 PM	H2 MFC set to  0.000000
7/3/2010	5:15:41 PM	BCl3 MFC set to  0.000000
7/3/2010	5:15:41 PM	PHl3 MFC set to  0.000000
7/3/2010	5:15:41 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:15:41 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:15:41 PM	Tube furnace set to 0
7/3/2010	5:15:49 PM	H2 valve closed
7/3/2010	5:15:50 PM	BCl3 valve closed
7/3/2010	5:15:50 PM	PH3 valve closed
7/3/2010	5:15:50 PM	SiCl4 pre valve closed
7/3/2010	5:15:50 PM	SiCl4 post valve closed
7/3/2010	5:15:50 PM	Bubbler valve closed
7/3/2010	5:15:50 PM	Helium valve opened
7/3/2010	5:15:50 PM	Main Vac valve opened
7/3/2010	5:15:50 PM	Bypass valve opened
7/3/2010	5:15:50 PM	Helium MFC set to  100.000000
7/3/2010	5:15:50 PM	H2 MFC set to  0.000000
7/3/2010	5:15:50 PM	BCl3 MFC set to  0.000000
7/3/2010	5:15:50 PM	PHl3 MFC set to  0.000000
7/3/2010	5:15:50 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:15:50 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:15:50 PM	Tube furnace set to 0
7/3/2010	5:18:49 PM	Helium valve closed
7/3/2010	5:18:49 PM	H2 valve closed
7/3/2010	5:18:49 PM	BCl3 valve closed
7/3/2010	5:18:49 PM	PH3 valve closed
7/3/2010	5:18:49 PM	SiCl4 pre valve closed
7/3/2010	5:18:49 PM	SiCl4 post valve closed
7/3/2010	5:18:49 PM	Bubbler valve closed
7/3/2010	5:18:49 PM	Main Vac valve opened
7/3/2010	5:18:49 PM	Bypass valve opened
7/3/2010	5:18:49 PM	Helium MFC set to  0.000000
7/3/2010	5:18:49 PM	H2 MFC set to  0.000000
7/3/2010	5:18:49 PM	BCl3 MFC set to  0.000000
7/3/2010	5:18:49 PM	PHl3 MFC set to  0.000000
7/3/2010	5:18:49 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:18:49 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:18:49 PM	Tube furnace set to 0
7/3/2010	5:19:49 PM	H2 valve closed
7/3/2010	5:19:49 PM	BCl3 valve closed
7/3/2010	5:19:49 PM	PH3 valve closed
7/3/2010	5:19:49 PM	SiCl4 pre valve closed
7/3/2010	5:19:49 PM	SiCl4 post valve closed
7/3/2010	5:19:49 PM	Bubbler valve closed
7/3/2010	5:19:49 PM	Helium valve opened
7/3/2010	5:19:49 PM	Main Vac valve opened
7/3/2010	5:19:49 PM	Bypass valve opened
7/3/2010	5:19:49 PM	Helium MFC set to  100.000000
7/3/2010	5:19:49 PM	H2 MFC set to  0.000000
7/3/2010	5:19:49 PM	BCl3 MFC set to  0.000000
7/3/2010	5:19:49 PM	PHl3 MFC set to  0.000000
7/3/2010	5:19:49 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:19:49 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:19:49 PM	Tube furnace set to 0
7/3/2010	5:21:59 PM	Run aborted at 5:21 PM
7/3/2010	5:21:59 PM	Helium valve closed
7/3/2010	5:21:59 PM	H2 valve closed
7/3/2010	5:21:59 PM	BCl3 valve closed
7/3/2010	5:21:59 PM	PH3 valve closed
7/3/2010	5:21:59 PM	SiCl4 pre valve closed
7/3/2010	5:21:59 PM	SiCl4 post valve closed
7/3/2010	5:21:59 PM	Bypass valve closed
7/3/2010	5:21:59 PM	Main Vac valve closed
7/3/2010	5:21:59 PM	Bubbler valve closed
7/3/2010	5:21:59 PM	Helium MFC set to  0.000000
7/3/2010	5:21:59 PM	H2 MFC set to  0.000000
7/3/2010	5:21:59 PM	BCl3 MFC set to  0.000000
7/3/2010	5:21:59 PM	PHl3 MFC set to  0.000000
7/3/2010	5:21:59 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:21:59 PM	Tube furnace set to 0
7/3/2010	5:21:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	5:22:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:22:03 PM	Recipe started at 5:22 PM
7/3/2010	5:22:03 PM	H2 valve closed
7/3/2010	5:22:03 PM	BCl3 valve closed
7/3/2010	5:22:03 PM	PH3 valve closed
7/3/2010	5:22:03 PM	SiCl4 pre valve closed
7/3/2010	5:22:03 PM	SiCl4 post valve closed
7/3/2010	5:22:03 PM	Main Vac valve closed
7/3/2010	5:22:03 PM	Bypass valve closed
7/3/2010	5:22:03 PM	Bubbler valve closed
7/3/2010	5:22:03 PM	Helium valve opened
7/3/2010	5:22:03 PM	Helium MFC set to  500.000000
7/3/2010	5:22:03 PM	H2 MFC set to  0.000000
7/3/2010	5:22:03 PM	BCl3 MFC set to  0.000000
7/3/2010	5:22:03 PM	PHl3 MFC set to  0.000000
7/3/2010	5:22:03 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:22:03 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:22:03 PM	Tube furnace set to 0
7/3/2010	5:23:23 PM	Helium valve closed
7/3/2010	5:23:23 PM	H2 valve closed
7/3/2010	5:23:23 PM	BCl3 valve closed
7/3/2010	5:23:23 PM	PH3 valve closed
7/3/2010	5:23:23 PM	SiCl4 pre valve closed
7/3/2010	5:23:23 PM	SiCl4 post valve closed
7/3/2010	5:23:23 PM	Main Vac valve closed
7/3/2010	5:23:23 PM	Bypass valve closed
7/3/2010	5:23:23 PM	Bubbler valve closed
7/3/2010	5:23:23 PM	Helium MFC set to  0.000000
7/3/2010	5:23:23 PM	H2 MFC set to  0.000000
7/3/2010	5:23:23 PM	BCl3 MFC set to  0.000000
7/3/2010	5:23:23 PM	PHl3 MFC set to  0.000000
7/3/2010	5:23:23 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:23:23 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:23:23 PM	Tube furnace set to 0
7/3/2010	5:23:23 PM	Run finished at 5:23 PM
7/3/2010	5:23:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:30:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:30:43 PM	Recipe started at 5:30 PM
7/3/2010	5:30:43 PM	H2 valve closed
7/3/2010	5:30:43 PM	BCl3 valve closed
7/3/2010	5:30:43 PM	PH3 valve closed
7/3/2010	5:30:43 PM	SiCl4 pre valve closed
7/3/2010	5:30:43 PM	SiCl4 post valve closed
7/3/2010	5:30:43 PM	Main Vac valve closed
7/3/2010	5:30:43 PM	Bypass valve closed
7/3/2010	5:30:43 PM	Bubbler valve closed
7/3/2010	5:30:43 PM	Helium valve opened
7/3/2010	5:30:43 PM	Helium MFC set to  500.000000
7/3/2010	5:30:43 PM	H2 MFC set to  0.000000
7/3/2010	5:30:43 PM	BCl3 MFC set to  0.000000
7/3/2010	5:30:43 PM	PHl3 MFC set to  0.000000
7/3/2010	5:30:43 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:30:43 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:30:43 PM	Tube furnace set to 0
7/3/2010	5:30:44 PM	Helium valve closed
7/3/2010	5:30:44 PM	H2 valve closed
7/3/2010	5:30:44 PM	BCl3 valve closed
7/3/2010	5:30:44 PM	PH3 valve closed
7/3/2010	5:30:44 PM	SiCl4 pre valve closed
7/3/2010	5:30:44 PM	SiCl4 post valve closed
7/3/2010	5:30:44 PM	Main Vac valve closed
7/3/2010	5:30:44 PM	Bypass valve closed
7/3/2010	5:30:44 PM	Bubbler valve closed
7/3/2010	5:30:44 PM	Helium MFC set to  0.000000
7/3/2010	5:30:44 PM	H2 MFC set to  0.000000
7/3/2010	5:30:44 PM	BCl3 MFC set to  0.000000
7/3/2010	5:30:44 PM	PHl3 MFC set to  0.000000
7/3/2010	5:30:44 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:30:44 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:30:44 PM	Tube furnace set to 0
7/3/2010	5:30:44 PM	Run finished at 5:30 PM
7/3/2010	5:30:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2010	5:30:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	5:30:47 PM	Recipe started at 5:30 PM
7/3/2010	5:30:47 PM	Helium valve closed
7/3/2010	5:30:47 PM	H2 valve closed
7/3/2010	5:30:47 PM	BCl3 valve closed
7/3/2010	5:30:47 PM	PH3 valve closed
7/3/2010	5:30:47 PM	SiCl4 pre valve closed
7/3/2010	5:30:47 PM	SiCl4 post valve closed
7/3/2010	5:30:47 PM	Main Vac valve closed
7/3/2010	5:30:47 PM	Bubbler valve closed
7/3/2010	5:30:47 PM	Bypass valve opened
7/3/2010	5:30:47 PM	Helium MFC set to  0.000000
7/3/2010	5:30:47 PM	H2 MFC set to  0.000000
7/3/2010	5:30:47 PM	BCl3 MFC set to  0.000000
7/3/2010	5:30:47 PM	PHl3 MFC set to  0.000000
7/3/2010	5:30:47 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:30:47 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:30:47 PM	Tube furnace set to 0
7/3/2010	5:34:54 PM	Run aborted at 5:34 PM
7/3/2010	5:34:54 PM	Helium valve closed
7/3/2010	5:34:54 PM	H2 valve closed
7/3/2010	5:34:54 PM	BCl3 valve closed
7/3/2010	5:34:54 PM	PH3 valve closed
7/3/2010	5:34:54 PM	SiCl4 pre valve closed
7/3/2010	5:34:54 PM	SiCl4 post valve closed
7/3/2010	5:34:54 PM	Bypass valve closed
7/3/2010	5:34:54 PM	Main Vac valve closed
7/3/2010	5:34:54 PM	Bubbler valve closed
7/3/2010	5:34:54 PM	Helium MFC set to  0.000000
7/3/2010	5:34:54 PM	H2 MFC set to  0.000000
7/3/2010	5:34:54 PM	BCl3 MFC set to  0.000000
7/3/2010	5:34:54 PM	PHl3 MFC set to  0.000000
7/3/2010	5:34:54 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:34:54 PM	Tube furnace set to 0
7/3/2010	5:34:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	5:37:21 PM	Bypass valve opened
7/3/2010	5:37:51 PM	Main Vac valve opened
7/3/2010	5:39:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	5:39:11 PM	Recipe started at 5:39 PM
7/3/2010	5:39:11 PM	Helium valve closed
7/3/2010	5:39:11 PM	H2 valve closed
7/3/2010	5:39:11 PM	BCl3 valve closed
7/3/2010	5:39:11 PM	PH3 valve closed
7/3/2010	5:39:11 PM	SiCl4 pre valve closed
7/3/2010	5:39:11 PM	SiCl4 post valve closed
7/3/2010	5:39:11 PM	Main Vac valve closed
7/3/2010	5:39:11 PM	Bubbler valve closed
7/3/2010	5:39:11 PM	Bypass valve opened
7/3/2010	5:39:11 PM	Helium MFC set to  0.000000
7/3/2010	5:39:11 PM	H2 MFC set to  0.000000
7/3/2010	5:39:11 PM	BCl3 MFC set to  0.000000
7/3/2010	5:39:11 PM	PHl3 MFC set to  0.000000
7/3/2010	5:39:11 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:39:11 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:39:11 PM	Tube furnace set to 0
7/3/2010	5:39:11 PM	Helium valve closed
7/3/2010	5:39:11 PM	H2 valve closed
7/3/2010	5:39:11 PM	BCl3 valve closed
7/3/2010	5:39:11 PM	PH3 valve closed
7/3/2010	5:39:11 PM	SiCl4 pre valve closed
7/3/2010	5:39:11 PM	SiCl4 post valve closed
7/3/2010	5:39:11 PM	Bubbler valve closed
7/3/2010	5:39:11 PM	Main Vac valve opened
7/3/2010	5:39:11 PM	Bypass valve opened
7/3/2010	5:39:11 PM	Helium MFC set to  0.000000
7/3/2010	5:39:11 PM	H2 MFC set to  0.000000
7/3/2010	5:39:11 PM	BCl3 MFC set to  0.000000
7/3/2010	5:39:11 PM	PHl3 MFC set to  0.000000
7/3/2010	5:39:11 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:39:11 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:39:12 PM	Tube furnace set to 0
7/3/2010	5:40:12 PM	H2 valve closed
7/3/2010	5:40:12 PM	BCl3 valve closed
7/3/2010	5:40:12 PM	PH3 valve closed
7/3/2010	5:40:12 PM	SiCl4 pre valve closed
7/3/2010	5:40:12 PM	SiCl4 post valve closed
7/3/2010	5:40:12 PM	Bubbler valve closed
7/3/2010	5:40:12 PM	Helium valve opened
7/3/2010	5:40:12 PM	Main Vac valve opened
7/3/2010	5:40:12 PM	Bypass valve opened
7/3/2010	5:40:12 PM	Helium MFC set to  100.000000
7/3/2010	5:40:12 PM	H2 MFC set to  0.000000
7/3/2010	5:40:12 PM	BCl3 MFC set to  0.000000
7/3/2010	5:40:12 PM	PHl3 MFC set to  0.000000
7/3/2010	5:40:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:40:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:40:12 PM	Tube furnace set to 0
7/3/2010	5:49:12 PM	Helium valve closed
7/3/2010	5:49:12 PM	H2 valve closed
7/3/2010	5:49:12 PM	BCl3 valve closed
7/3/2010	5:49:12 PM	PH3 valve closed
7/3/2010	5:49:12 PM	SiCl4 pre valve closed
7/3/2010	5:49:12 PM	SiCl4 post valve closed
7/3/2010	5:49:12 PM	Bubbler valve closed
7/3/2010	5:49:12 PM	Main Vac valve opened
7/3/2010	5:49:12 PM	Bypass valve opened
7/3/2010	5:49:12 PM	Helium MFC set to  0.000000
7/3/2010	5:49:12 PM	H2 MFC set to  0.000000
7/3/2010	5:49:12 PM	BCl3 MFC set to  0.000000
7/3/2010	5:49:12 PM	PHl3 MFC set to  0.000000
7/3/2010	5:49:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:49:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:49:12 PM	Tube furnace set to 0
7/3/2010	5:50:12 PM	H2 valve closed
7/3/2010	5:50:12 PM	BCl3 valve closed
7/3/2010	5:50:12 PM	PH3 valve closed
7/3/2010	5:50:12 PM	SiCl4 pre valve closed
7/3/2010	5:50:12 PM	SiCl4 post valve closed
7/3/2010	5:50:12 PM	Bubbler valve closed
7/3/2010	5:50:12 PM	Helium valve opened
7/3/2010	5:50:12 PM	Main Vac valve opened
7/3/2010	5:50:12 PM	Bypass valve opened
7/3/2010	5:50:12 PM	Helium MFC set to  100.000000
7/3/2010	5:50:12 PM	H2 MFC set to  0.000000
7/3/2010	5:50:12 PM	BCl3 MFC set to  0.000000
7/3/2010	5:50:12 PM	PHl3 MFC set to  0.000000
7/3/2010	5:50:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:50:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:50:12 PM	Tube furnace set to 0
7/3/2010	5:59:12 PM	Helium valve closed
7/3/2010	5:59:12 PM	H2 valve closed
7/3/2010	5:59:12 PM	BCl3 valve closed
7/3/2010	5:59:12 PM	PH3 valve closed
7/3/2010	5:59:12 PM	SiCl4 pre valve closed
7/3/2010	5:59:12 PM	SiCl4 post valve closed
7/3/2010	5:59:12 PM	Bubbler valve closed
7/3/2010	5:59:12 PM	Main Vac valve opened
7/3/2010	5:59:12 PM	Bypass valve opened
7/3/2010	5:59:12 PM	Helium MFC set to  0.000000
7/3/2010	5:59:12 PM	H2 MFC set to  0.000000
7/3/2010	5:59:12 PM	BCl3 MFC set to  0.000000
7/3/2010	5:59:12 PM	PHl3 MFC set to  0.000000
7/3/2010	5:59:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	5:59:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	5:59:12 PM	Tube furnace set to 0
7/3/2010	6:00:12 PM	H2 valve closed
7/3/2010	6:00:12 PM	BCl3 valve closed
7/3/2010	6:00:12 PM	PH3 valve closed
7/3/2010	6:00:12 PM	SiCl4 pre valve closed
7/3/2010	6:00:12 PM	SiCl4 post valve closed
7/3/2010	6:00:12 PM	Bubbler valve closed
7/3/2010	6:00:12 PM	Helium valve opened
7/3/2010	6:00:12 PM	Main Vac valve opened
7/3/2010	6:00:12 PM	Bypass valve opened
7/3/2010	6:00:12 PM	Helium MFC set to  100.000000
7/3/2010	6:00:12 PM	H2 MFC set to  0.000000
7/3/2010	6:00:12 PM	BCl3 MFC set to  0.000000
7/3/2010	6:00:12 PM	PHl3 MFC set to  0.000000
7/3/2010	6:00:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	6:00:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	6:00:12 PM	Tube furnace set to 0
7/3/2010	6:09:12 PM	Helium valve closed
7/3/2010	6:09:12 PM	H2 valve closed
7/3/2010	6:09:12 PM	BCl3 valve closed
7/3/2010	6:09:12 PM	PH3 valve closed
7/3/2010	6:09:12 PM	SiCl4 pre valve closed
7/3/2010	6:09:12 PM	SiCl4 post valve closed
7/3/2010	6:09:12 PM	Bubbler valve closed
7/3/2010	6:09:12 PM	Main Vac valve opened
7/3/2010	6:09:12 PM	Bypass valve opened
7/3/2010	6:09:12 PM	Helium MFC set to  0.000000
7/3/2010	6:09:12 PM	H2 MFC set to  0.000000
7/3/2010	6:09:12 PM	BCl3 MFC set to  0.000000
7/3/2010	6:09:12 PM	PHl3 MFC set to  0.000000
7/3/2010	6:09:12 PM	SiCl4 MFC set to  0.000000
7/3/2010	6:09:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	6:09:13 PM	Tube furnace set to 0
7/3/2010	6:09:14 PM	Run finished at 6:09 PM
7/3/2010	6:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	8:14:30 PM	Helium MFC set to  100.000000
7/3/2010	8:14:32 PM	Helium valve opened
7/3/2010	8:22:16 PM	Helium valve closed
7/3/2010	8:23:05 PM	Bypass valve closed
7/3/2010	8:23:06 PM	Main Vac valve closed
7/3/2010	8:23:22 PM	Bypass valve opened
7/3/2010	8:23:23 PM	Main Vac valve opened
7/3/2010	8:23:43 PM	Recipe started at 8:23 PM
7/3/2010	8:23:43 PM	Helium valve closed
7/3/2010	8:23:43 PM	BCl3 valve closed
7/3/2010	8:23:43 PM	PH3 valve closed
7/3/2010	8:23:43 PM	SiCl4 pre valve closed
7/3/2010	8:23:43 PM	SiCl4 post valve closed
7/3/2010	8:23:43 PM	Main Vac valve closed
7/3/2010	8:23:43 PM	Bypass valve closed
7/3/2010	8:23:43 PM	Bubbler valve closed
7/3/2010	8:23:43 PM	H2 valve opened
7/3/2010	8:23:43 PM	Helium MFC set to  0.000000
7/3/2010	8:23:43 PM	H2 MFC set to  500.000000
7/3/2010	8:23:43 PM	BCl3 MFC set to  0.000000
7/3/2010	8:23:43 PM	PHl3 MFC set to  0.000000
7/3/2010	8:23:43 PM	SiCl4 MFC set to  0.000000
7/3/2010	8:23:43 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	8:23:43 PM	Tube furnace set to 0
7/3/2010	8:25:06 PM	Helium valve closed
7/3/2010	8:25:06 PM	BCl3 valve closed
7/3/2010	8:25:06 PM	PH3 valve closed
7/3/2010	8:25:06 PM	SiCl4 pre valve closed
7/3/2010	8:25:06 PM	SiCl4 post valve closed
7/3/2010	8:25:06 PM	Main Vac valve closed
7/3/2010	8:25:06 PM	Bypass valve closed
7/3/2010	8:25:06 PM	H2 valve opened
7/3/2010	8:25:06 PM	Bubbler valve opened
7/3/2010	8:25:06 PM	Helium MFC set to  0.000000
7/3/2010	8:25:06 PM	H2 MFC set to  500.000000
7/3/2010	8:25:06 PM	BCl3 MFC set to  0.000000
7/3/2010	8:25:06 PM	PHl3 MFC set to  0.000000
7/3/2010	8:25:06 PM	SiCl4 MFC set to  0.000000
7/3/2010	8:25:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	8:25:06 PM	Tube furnace set to 1000
7/3/2010	8:45:06 PM	Helium valve closed
7/3/2010	8:45:06 PM	PH3 valve closed
7/3/2010	8:45:06 PM	Main Vac valve closed
7/3/2010	8:45:06 PM	Bypass valve closed
7/3/2010	8:45:06 PM	H2 valve opened
7/3/2010	8:45:06 PM	BCl3 valve opened
7/3/2010	8:45:06 PM	SiCl4 pre valve opened
7/3/2010	8:45:06 PM	SiCl4 post valve opened
7/3/2010	8:45:06 PM	Bubbler valve opened
7/3/2010	8:45:06 PM	Helium MFC set to  0.000000
7/3/2010	8:45:06 PM	H2 MFC set to  500.000000
7/3/2010	8:45:06 PM	BCl3 MFC set to  35.000000
7/3/2010	8:45:06 PM	PHl3 MFC set to  0.000000
7/3/2010	8:45:06 PM	SiCl4 MFC set to  50.000000
7/3/2010	8:45:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	8:45:06 PM	Tube furnace set to 1000
7/3/2010	9:00:06 PM	H2 valve closed
7/3/2010	9:00:06 PM	BCl3 valve closed
7/3/2010	9:00:06 PM	PH3 valve closed
7/3/2010	9:00:06 PM	SiCl4 pre valve closed
7/3/2010	9:00:06 PM	SiCl4 post valve closed
7/3/2010	9:00:06 PM	Main Vac valve closed
7/3/2010	9:00:06 PM	Bypass valve closed
7/3/2010	9:00:06 PM	Helium valve opened
7/3/2010	9:00:06 PM	Bubbler valve opened
7/3/2010	9:00:06 PM	Helium MFC set to  500.000000
7/3/2010	9:00:06 PM	H2 MFC set to  0.000000
7/3/2010	9:00:06 PM	BCl3 MFC set to  0.000000
7/3/2010	9:00:06 PM	PHl3 MFC set to  0.000000
7/3/2010	9:00:06 PM	SiCl4 MFC set to  0.000000
7/3/2010	9:00:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	9:00:06 PM	Tube furnace set to 750
7/3/2010	9:20:06 PM	H2 valve closed
7/3/2010	9:20:06 PM	BCl3 valve closed
7/3/2010	9:20:06 PM	PH3 valve closed
7/3/2010	9:20:06 PM	SiCl4 pre valve closed
7/3/2010	9:20:06 PM	SiCl4 post valve closed
7/3/2010	9:20:06 PM	Main Vac valve closed
7/3/2010	9:20:06 PM	Bypass valve closed
7/3/2010	9:20:06 PM	Helium valve opened
7/3/2010	9:20:06 PM	Bubbler valve opened
7/3/2010	9:20:06 PM	Helium MFC set to  500.000000
7/3/2010	9:20:06 PM	H2 MFC set to  0.000000
7/3/2010	9:20:06 PM	BCl3 MFC set to  0.000000
7/3/2010	9:20:06 PM	PHl3 MFC set to  0.000000
7/3/2010	9:20:06 PM	SiCl4 MFC set to  0.000000
7/3/2010	9:20:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	9:20:06 PM	Tube furnace set to 0
7/3/2010	9:40:06 PM	Helium valve closed
7/3/2010	9:40:06 PM	H2 valve closed
7/3/2010	9:40:06 PM	BCl3 valve closed
7/3/2010	9:40:06 PM	PH3 valve closed
7/3/2010	9:40:06 PM	SiCl4 pre valve closed
7/3/2010	9:40:06 PM	SiCl4 post valve closed
7/3/2010	9:40:06 PM	Main Vac valve closed
7/3/2010	9:40:06 PM	Bypass valve closed
7/3/2010	9:40:06 PM	Bubbler valve closed
7/3/2010	9:40:06 PM	Helium MFC set to  0.000000
7/3/2010	9:40:06 PM	H2 MFC set to  0.000000
7/3/2010	9:40:06 PM	BCl3 MFC set to  0.000000
7/3/2010	9:40:06 PM	PHl3 MFC set to  0.000000
7/3/2010	9:40:06 PM	SiCl4 MFC set to  0.000000
7/3/2010	9:40:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	9:40:06 PM	Tube furnace set to 0
7/3/2010	9:40:07 PM	Run finished at 9:40 PM
7/3/2010	10:12:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	10:12:39 PM	Recipe started at 10:12 PM
7/3/2010	10:12:39 PM	Helium valve closed
7/3/2010	10:12:39 PM	H2 valve closed
7/3/2010	10:12:39 PM	BCl3 valve closed
7/3/2010	10:12:39 PM	PH3 valve closed
7/3/2010	10:12:39 PM	SiCl4 pre valve closed
7/3/2010	10:12:39 PM	SiCl4 post valve closed
7/3/2010	10:12:39 PM	Main Vac valve closed
7/3/2010	10:12:39 PM	Bubbler valve closed
7/3/2010	10:12:39 PM	Bypass valve opened
7/3/2010	10:12:39 PM	Helium MFC set to  0.000000
7/3/2010	10:12:39 PM	H2 MFC set to  0.000000
7/3/2010	10:12:39 PM	BCl3 MFC set to  0.000000
7/3/2010	10:12:39 PM	PHl3 MFC set to  0.000000
7/3/2010	10:12:39 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:12:39 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:12:39 PM	Tube furnace set to 0
7/3/2010	10:13:28 PM	Helium valve closed
7/3/2010	10:13:28 PM	H2 valve closed
7/3/2010	10:13:28 PM	BCl3 valve closed
7/3/2010	10:13:28 PM	PH3 valve closed
7/3/2010	10:13:28 PM	SiCl4 pre valve closed
7/3/2010	10:13:28 PM	SiCl4 post valve closed
7/3/2010	10:13:28 PM	Bubbler valve closed
7/3/2010	10:13:28 PM	Main Vac valve opened
7/3/2010	10:13:28 PM	Bypass valve opened
7/3/2010	10:13:28 PM	Helium MFC set to  0.000000
7/3/2010	10:13:28 PM	H2 MFC set to  0.000000
7/3/2010	10:13:28 PM	BCl3 MFC set to  0.000000
7/3/2010	10:13:28 PM	PHl3 MFC set to  0.000000
7/3/2010	10:13:28 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:13:28 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:13:28 PM	Tube furnace set to 0
7/3/2010	10:13:28 PM	Run finished at 10:13 PM
7/3/2010	10:13:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2010	10:14:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	10:14:06 PM	Recipe started at 10:14 PM
7/3/2010	10:14:06 PM	Helium valve closed
7/3/2010	10:14:06 PM	H2 valve closed
7/3/2010	10:14:06 PM	BCl3 valve closed
7/3/2010	10:14:06 PM	PH3 valve closed
7/3/2010	10:14:06 PM	SiCl4 pre valve closed
7/3/2010	10:14:06 PM	SiCl4 post valve closed
7/3/2010	10:14:06 PM	Main Vac valve closed
7/3/2010	10:14:06 PM	Bubbler valve closed
7/3/2010	10:14:06 PM	Bypass valve opened
7/3/2010	10:14:06 PM	Helium MFC set to  0.000000
7/3/2010	10:14:06 PM	H2 MFC set to  0.000000
7/3/2010	10:14:06 PM	BCl3 MFC set to  0.000000
7/3/2010	10:14:06 PM	PHl3 MFC set to  0.000000
7/3/2010	10:14:06 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:14:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:14:06 PM	Tube furnace set to 0
7/3/2010	10:14:07 PM	Helium valve closed
7/3/2010	10:14:07 PM	H2 valve closed
7/3/2010	10:14:07 PM	BCl3 valve closed
7/3/2010	10:14:07 PM	PH3 valve closed
7/3/2010	10:14:07 PM	SiCl4 pre valve closed
7/3/2010	10:14:07 PM	SiCl4 post valve closed
7/3/2010	10:14:07 PM	Bubbler valve closed
7/3/2010	10:14:07 PM	Main Vac valve opened
7/3/2010	10:14:07 PM	Bypass valve opened
7/3/2010	10:14:07 PM	Helium MFC set to  0.000000
7/3/2010	10:14:07 PM	H2 MFC set to  0.000000
7/3/2010	10:14:07 PM	BCl3 MFC set to  0.000000
7/3/2010	10:14:07 PM	PHl3 MFC set to  0.000000
7/3/2010	10:14:07 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:14:07 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:14:07 PM	Tube furnace set to 0
7/3/2010	10:15:07 PM	H2 valve closed
7/3/2010	10:15:07 PM	BCl3 valve closed
7/3/2010	10:15:07 PM	PH3 valve closed
7/3/2010	10:15:07 PM	SiCl4 pre valve closed
7/3/2010	10:15:07 PM	SiCl4 post valve closed
7/3/2010	10:15:07 PM	Bubbler valve closed
7/3/2010	10:15:07 PM	Helium valve opened
7/3/2010	10:15:07 PM	Main Vac valve opened
7/3/2010	10:15:07 PM	Bypass valve opened
7/3/2010	10:15:07 PM	Helium MFC set to  100.000000
7/3/2010	10:15:07 PM	H2 MFC set to  0.000000
7/3/2010	10:15:07 PM	BCl3 MFC set to  0.000000
7/3/2010	10:15:07 PM	PHl3 MFC set to  0.000000
7/3/2010	10:15:07 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:15:07 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:15:07 PM	Tube furnace set to 0
7/3/2010	10:24:07 PM	Helium valve closed
7/3/2010	10:24:07 PM	H2 valve closed
7/3/2010	10:24:07 PM	BCl3 valve closed
7/3/2010	10:24:07 PM	PH3 valve closed
7/3/2010	10:24:07 PM	SiCl4 pre valve closed
7/3/2010	10:24:07 PM	SiCl4 post valve closed
7/3/2010	10:24:07 PM	Bubbler valve closed
7/3/2010	10:24:07 PM	Main Vac valve opened
7/3/2010	10:24:07 PM	Bypass valve opened
7/3/2010	10:24:07 PM	Helium MFC set to  0.000000
7/3/2010	10:24:07 PM	H2 MFC set to  0.000000
7/3/2010	10:24:07 PM	BCl3 MFC set to  0.000000
7/3/2010	10:24:07 PM	PHl3 MFC set to  0.000000
7/3/2010	10:24:07 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:24:07 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:24:07 PM	Tube furnace set to 0
7/3/2010	10:25:07 PM	H2 valve closed
7/3/2010	10:25:07 PM	BCl3 valve closed
7/3/2010	10:25:07 PM	PH3 valve closed
7/3/2010	10:25:07 PM	SiCl4 pre valve closed
7/3/2010	10:25:07 PM	SiCl4 post valve closed
7/3/2010	10:25:07 PM	Bubbler valve closed
7/3/2010	10:25:07 PM	Helium valve opened
7/3/2010	10:25:07 PM	Main Vac valve opened
7/3/2010	10:25:07 PM	Bypass valve opened
7/3/2010	10:25:07 PM	Helium MFC set to  100.000000
7/3/2010	10:25:07 PM	H2 MFC set to  0.000000
7/3/2010	10:25:07 PM	BCl3 MFC set to  0.000000
7/3/2010	10:25:07 PM	PHl3 MFC set to  0.000000
7/3/2010	10:25:07 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:25:07 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:25:07 PM	Tube furnace set to 0
7/3/2010	10:34:07 PM	Helium valve closed
7/3/2010	10:34:07 PM	H2 valve closed
7/3/2010	10:34:07 PM	BCl3 valve closed
7/3/2010	10:34:07 PM	PH3 valve closed
7/3/2010	10:34:07 PM	SiCl4 pre valve closed
7/3/2010	10:34:07 PM	SiCl4 post valve closed
7/3/2010	10:34:07 PM	Bubbler valve closed
7/3/2010	10:34:07 PM	Main Vac valve opened
7/3/2010	10:34:07 PM	Bypass valve opened
7/3/2010	10:34:07 PM	Helium MFC set to  0.000000
7/3/2010	10:34:07 PM	H2 MFC set to  0.000000
7/3/2010	10:34:07 PM	BCl3 MFC set to  0.000000
7/3/2010	10:34:07 PM	PHl3 MFC set to  0.000000
7/3/2010	10:34:07 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:34:07 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:34:08 PM	Tube furnace set to 0
7/3/2010	10:35:08 PM	H2 valve closed
7/3/2010	10:35:08 PM	BCl3 valve closed
7/3/2010	10:35:08 PM	PH3 valve closed
7/3/2010	10:35:08 PM	SiCl4 pre valve closed
7/3/2010	10:35:08 PM	SiCl4 post valve closed
7/3/2010	10:35:08 PM	Bubbler valve closed
7/3/2010	10:35:08 PM	Helium valve opened
7/3/2010	10:35:08 PM	Main Vac valve opened
7/3/2010	10:35:08 PM	Bypass valve opened
7/3/2010	10:35:08 PM	Helium MFC set to  100.000000
7/3/2010	10:35:08 PM	H2 MFC set to  0.000000
7/3/2010	10:35:08 PM	BCl3 MFC set to  0.000000
7/3/2010	10:35:08 PM	PHl3 MFC set to  0.000000
7/3/2010	10:35:08 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:35:08 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:35:08 PM	Tube furnace set to 0
7/3/2010	10:44:08 PM	Helium valve closed
7/3/2010	10:44:08 PM	H2 valve closed
7/3/2010	10:44:08 PM	BCl3 valve closed
7/3/2010	10:44:08 PM	PH3 valve closed
7/3/2010	10:44:08 PM	SiCl4 pre valve closed
7/3/2010	10:44:08 PM	SiCl4 post valve closed
7/3/2010	10:44:08 PM	Bubbler valve closed
7/3/2010	10:44:08 PM	Main Vac valve opened
7/3/2010	10:44:08 PM	Bypass valve opened
7/3/2010	10:44:08 PM	Helium MFC set to  0.000000
7/3/2010	10:44:08 PM	H2 MFC set to  0.000000
7/3/2010	10:44:08 PM	BCl3 MFC set to  0.000000
7/3/2010	10:44:08 PM	PHl3 MFC set to  0.000000
7/3/2010	10:44:08 PM	SiCl4 MFC set to  0.000000
7/3/2010	10:44:08 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	10:44:08 PM	Tube furnace set to 0
7/3/2010	10:44:09 PM	Run finished at 10:44 PM
7/3/2010	10:44:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/3/2010	11:06:11 PM	Helium MFC set to  100.000000
7/3/2010	11:06:12 PM	Helium valve opened
7/3/2010	11:07:03 PM	Helium valve closed
7/3/2010	11:07:52 PM	Helium valve opened
7/3/2010	11:13:53 PM	Helium valve closed
7/3/2010	11:14:45 PM	Bypass valve closed
7/3/2010	11:14:45 PM	Main Vac valve closed
7/3/2010	11:14:55 PM	Bypass valve opened
7/3/2010	11:14:55 PM	Main Vac valve opened
7/3/2010	11:15:00 PM	Helium valve opened
7/3/2010	11:15:05 PM	Helium valve closed
7/3/2010	11:16:09 PM	Recipe started at 11:16 PM
7/3/2010	11:16:09 PM	Helium valve closed
7/3/2010	11:16:09 PM	BCl3 valve closed
7/3/2010	11:16:09 PM	PH3 valve closed
7/3/2010	11:16:09 PM	SiCl4 pre valve closed
7/3/2010	11:16:09 PM	SiCl4 post valve closed
7/3/2010	11:16:09 PM	Main Vac valve closed
7/3/2010	11:16:09 PM	Bypass valve closed
7/3/2010	11:16:09 PM	Bubbler valve closed
7/3/2010	11:16:09 PM	H2 valve opened
7/3/2010	11:16:09 PM	Helium MFC set to  0.000000
7/3/2010	11:16:09 PM	H2 MFC set to  500.000000
7/3/2010	11:16:09 PM	BCl3 MFC set to  0.000000
7/3/2010	11:16:09 PM	PHl3 MFC set to  0.000000
7/3/2010	11:16:09 PM	SiCl4 MFC set to  0.000000
7/3/2010	11:16:09 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	11:16:09 PM	Tube furnace set to 0
7/3/2010	11:17:28 PM	Helium valve closed
7/3/2010	11:17:28 PM	BCl3 valve closed
7/3/2010	11:17:28 PM	PH3 valve closed
7/3/2010	11:17:28 PM	SiCl4 pre valve closed
7/3/2010	11:17:28 PM	SiCl4 post valve closed
7/3/2010	11:17:28 PM	Main Vac valve closed
7/3/2010	11:17:28 PM	Bypass valve closed
7/3/2010	11:17:28 PM	H2 valve opened
7/3/2010	11:17:28 PM	Bubbler valve opened
7/3/2010	11:17:28 PM	Helium MFC set to  0.000000
7/3/2010	11:17:28 PM	H2 MFC set to  500.000000
7/3/2010	11:17:28 PM	BCl3 MFC set to  0.000000
7/3/2010	11:17:28 PM	PHl3 MFC set to  0.000000
7/3/2010	11:17:28 PM	SiCl4 MFC set to  0.000000
7/3/2010	11:17:28 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	11:17:28 PM	Tube furnace set to 1000
7/3/2010	11:37:28 PM	Helium valve closed
7/3/2010	11:37:28 PM	PH3 valve closed
7/3/2010	11:37:28 PM	Main Vac valve closed
7/3/2010	11:37:28 PM	Bypass valve closed
7/3/2010	11:37:28 PM	H2 valve opened
7/3/2010	11:37:28 PM	BCl3 valve opened
7/3/2010	11:37:28 PM	SiCl4 pre valve opened
7/3/2010	11:37:28 PM	SiCl4 post valve opened
7/3/2010	11:37:28 PM	Bubbler valve opened
7/3/2010	11:37:28 PM	Helium MFC set to  0.000000
7/3/2010	11:37:28 PM	H2 MFC set to  500.000000
7/3/2010	11:37:28 PM	BCl3 MFC set to  35.000000
7/3/2010	11:37:28 PM	PHl3 MFC set to  0.000000
7/3/2010	11:37:28 PM	SiCl4 MFC set to  50.000000
7/3/2010	11:37:28 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	11:37:29 PM	Tube furnace set to 1000
7/3/2010	11:52:29 PM	H2 valve closed
7/3/2010	11:52:29 PM	BCl3 valve closed
7/3/2010	11:52:29 PM	PH3 valve closed
7/3/2010	11:52:29 PM	SiCl4 pre valve closed
7/3/2010	11:52:29 PM	SiCl4 post valve closed
7/3/2010	11:52:29 PM	Main Vac valve closed
7/3/2010	11:52:29 PM	Bypass valve closed
7/3/2010	11:52:29 PM	Helium valve opened
7/3/2010	11:52:29 PM	Bubbler valve opened
7/3/2010	11:52:29 PM	Helium MFC set to  500.000000
7/3/2010	11:52:29 PM	H2 MFC set to  0.000000
7/3/2010	11:52:29 PM	BCl3 MFC set to  0.000000
7/3/2010	11:52:29 PM	PHl3 MFC set to  0.000000
7/3/2010	11:52:29 PM	SiCl4 MFC set to  0.000000
7/3/2010	11:52:29 PM	Bypass solenoid MFC set to  0.000000
7/3/2010	11:52:29 PM	Tube furnace set to 750
